Pulsed plasma polymerization of pentafluorostyrene: Synthesis of low dielectric constant films

Journal of Applied Physics

Volumn 84, Issue 1, 1998, Pages 439-444

  Han, Licheng M ^a   Timmons, Richard B ^a   Lee, Wei W ^b   Chen, Yuanye ^c   Hu, Zhibing ^c  

^a UNIVERSITY OF TEXAS AT ARLINGTON   (United States)

^b TEXAS INSTRUMENTS   (United States)

^c UNIVERSITY OF NORTH TEXAS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001208810     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.368046     Document Type: Article

References (14)

1. S. P. Muraka, Solid State Technol. 39, 83 (1996).
2. Mater. Res. Soc. Symp. Proc. 476 (1996), edited by C. Case, P. Kohl, and W. W. Lee.
3. C. R. Savage, R. B. Timmons, and J. W. Lin, Chem. Mater. 3, 575 (1991).
4. C. L. Rinsch, X. Chen, V. Panchalingam, R. C. Eberhart, J.-H. Wang, and R. B. Timmons, Langmuir 12, 2995 (1996).
5. J.-H. Wang, J.-J. Chen, and R. B. Timmons, Chem. Mater. 8, 2212 (1996).
6. C. R. Savage, J. W. Lin, and R. B. Timmons, Adv. Chem. Ser. 236, 745 (1993).
7. G. Beamson and D. Briggs, The Scienta ESCA 300 Database (Wiley, New York, 1992).
8. H. Yasuda, Plasma Polymerization (Academic, Orlando, FL, 1985).
9. C. B. Labelle, S. J. Limb, and K. K. Gleason, 1997 Proc. 3rd International Dielectrics for ULSI Multilevel Interconnection Conference (DUMIC); Santa Clara, CA; ISMIC-222D, 98 (1997).
10. H. Kudo, S. Takeishi, R. Shinohara and M. Yamada, 1997 Proc. 3rd International Dielectrics for ULSI Multilevel Interconnection Conference (DUMIC); Santa Clara, CA; ISMIC-222D, 85 (1997).
11. N. G. McCrum, B. E. Read, and G. Williams, in Inelastic and Dielectric Effects in Polymeric Solids (Wiley, New York, 1967), p. 109.
12. X. Chen, K. Rajeshwar, R. B. Timmons, J.-J. Chen, and O. M. R. Chyan, Chem. Mater. 8, 1067 (1996).
13. M. E. Ryan, A. M. Hynes, and J. P. S. Badyal, Chem. Mater. 8, 37 (1996).
14. N. M. Mackie, N. F. Dalleska, D. G. Castner, and E. R. Fisher, Chem. Mater. 9, 349 (1997).