Addition of hetero-atoms to the polymer film by plasma enhanced polymerization and its optical properties

IEEJ Transactions on Fundamentals and Materials

Volumn 129, Issue 8, 2009, Pages

  Moriki, Kazunori ^a   Yumoto, Motoshige ^a  

^a TOKYO CITY UNIVERSITY   (Japan)

Author keywords

Amorphous hydrogenated carbon; Hetero atom addition; Optical constant; Plasma enhanced polymerization

Indexed keywords

AMORPHOUS HYDROGENATED CARBON; CHANGE OF REFRACTIVE INDEX; FLUORINE ATOMS; HETERO-ATOM ADDITION; NITROGEN ATOM; OPTICAL ABSORPTION; OPTICAL POLYMER WAVEGUIDES; OXYGEN ATOM; SURFACE GEOMETRIES;

ABSORPTION; AMORPHOUS CARBON; ATOMS; ESTERS; FLUORINE; HYDROGENATION; INTEGRATED OPTOELECTRONICS; LIGHT ABSORPTION; LIGHT REFRACTION; MONOMERS; OPTICAL COMMUNICATION; OPTICAL CONSTANTS; ORGANIC POLYMERS; OXYGEN; PLASMAS; POLYMER FILMS; POLYMERIZATION; POLYMERS; REFRACTIVE INDEX; REFRACTOMETERS; WAVEGUIDES;

OPTICAL FILMS;

EID: 72149126843     PISSN: 03854205     EISSN: 13475533     Source Type: Journal    
DOI: 10.1541/ieejfms.129.555     Document Type: Article

References (9)

1. K. Moriki, T. Satho, A. Itabashi, and M. Yumoto: "Fabrication of an optical polymer waveguide by plasma enhanced polymerization", IEEJ Trans. FM, Vol.128, No.2, pp.75-80 (2008-2) (in Japanese)
2. D. W. Van Krevielen and P. J. Hoftyzer: "Properties of polymers", Elservier publishing Company (1972)
3. A. Helmbold and D. Meissner: "Optical absorption of amorphous hydrogenated carbon thin films", Thin Solid Films, Vol.283, pp. 196-203 (1996)
4. K. Moriki, T. Satho, A. Itabashi, and M. Yumoto: "Effect of substrate temperature on the thin polymer film properties deposited by plasma CVD using cyclo-hexa-hydrocarbon", IEEJ Trans. FM, Vol.128, No.4, pp.268-274 (2008-4) (in Japanese)
5. M. S. Hwang and C. Lee: "Effects of oxygen and nitrogen addition on the optical properties of diamond-like carbon films". Materials Science & Engineering, Vol.B75, pp.24-28 (2000)
6. H. Yasuda: Plasma polymerization, Academic press INC (1985)
7. S. Imamura, R. Yoshimura, and T. Izawa: "Polymer channel waveguides with low loss at 1.3 μm", Electron. Lett., Vol.27, pp.1342-1345 (1992)
8. J. Ballato, S. H. Foulger, and D. W. Smith Jr.,: "Optical properties of fluorocyclobutyl polymers. II. Theoretical and experimental attenuation", J. Opt. Soc. Am. B, Vol.21, pp.958-967 (2004)
9. B. A. Kuruvilla, M. Zambre, S. Gosavi, S. Gorwadkar, A. Datta, S. A. Gangal, and S. K. Kulkarni: "Analysis of PPMMA films from oxygen plasma using X-ray photoelectron spectroscopy", J. Polym. Sci. Part A, Vol.32, pp.2275-2281 (1994)