Fabrication of three-dimensional (3D) woodpile structure photonic crystal with layer by layer e-beam lithography

Applied Physics A: Materials Science and Processing

Volumn 95, Issue 2, 2009, Pages 329-334

  Wang, Li ^a   Zhang, Sasa ^a,b   Wang, Qingpu ^b   Chen, Jiaqi ^a   Jiang, Wei ^c   Chen, Ray T ^a  

^a The University of Texas at Austin   (United States)

^b SHANDONG UNIVERSITY   (China)

^c RUTGERS UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ATOMIC STRUCTURE; DENSE WAVELENGTH DIVISION MULTIPLEXING; ELECTRON BEAM LITHOGRAPHY; FABRICATION; FIBER OPTICS; MULTIPLEXING; MULTIPLEXING EQUIPMENT; PRISMS; SCANNING ELECTRON MICROSCOPY; SILICON ON INSULATOR TECHNOLOGY; THREE DIMENSIONAL;

1550 NM; BEAM-STEERING; E-BEAM LITHOGRAPHIES; LAYER BY LAYERS; LIGHT BEAMS; OPTICAL COMPONENTS; PROPER DESIGNS; SUPERPRISM; SUPERPRISM EFFECTS; THREE-DIMENSIONAL (3D); THREE-DIMENSIONAL (3D) PHOTONIC CRYSTALS; WOODPILE STRUCTURES;

PHOTONIC CRYSTALS;

EID: 62349126742     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-009-5076-7     Document Type: Article

References (25)

1. E. Yablonovitch 1987 Phys. Rev. Lett. 58 2059
2. S. John 1987 Phys. Rev. Lett. 58 2486
3. J.D. Joannopoulos, R.D. Meade, J.N. Winn, Photonic Crystals (Princeton, New York, 1995)
4. W. Jiang R.T. Chen 2003 Phys. Rev. Lett. 91 213901
5. Y. Jiang W. Jiang L. Gu X. Chen R.T. Chen 2005 Appl. Phys. Lett. 87 221105
6. H. Kosaka T. Kawashima A. Tomita M. Notomi T. Tamamura T. Sato S. Kawakami 1998 Phys. Rev. B. 58 R10096
7. T. Baba M. Nakamura 2002 J. Quantum Electron. 38 909
8. K.B. Chung S.W. Hong 2002 Appl. Phys. Lett. 81 1549
9. L. Wu Y. Zhong C.T. Chan K.S. Wong G.P. Wang 2005 Appl. Phys. Lett. 86 241102
10. H. Benisty J. Lourtioz A. Chelnokov S. Combrie X. Checoury 2006 Proc. IEEE 94 997
11. L. Wang W. Jiang X. Chen L. Gu J. Chen R.T. Chen 2007 J. Appl. Phys. 101 114316
12. K. Aoki H.T. Miyazaki H. Hirayama K. Inoshita T. Baba 2003 Nat. Mater. 2 117
13. M. Deubel G.V. Freymann M. Wegner S. Pereira K. Busch C.M. Soukoulis 2004 Nat. Mater. 3 444
14. G. Subramania S.Y. Lin 2004 Appl. Phys. Lett. 85 5037
15. M. Qi E. Lidorikis P.T. Rakich S.G. Johnson J.D. Joannopoulos E.P. Ippen H.I. Smith 2004 Nature 429 538
16. G. Subramania Y.J. Lee B.A. Hernandez-Sanchez A.J. Fischer T.S. Luk I. Brener P.G. Clem T.J. Boyle 2007 Opt. Express 15 13049
17. K.M. Ho C.T. Chan C.M. Soukoulis 1990 Phys. Rev. Lett. 65 3152
18. K.M. Ho C.T. Chan C.M. Soukoulis R. Biswas M. Sigalas 1994 Solid State Commun. 89 413
19. S.Y. Lin J.G. Fleming D.L. Hetherington B.K. Smith R. Biswas K.M. Ho M.M. Sigalas W. Zubrzycki S.R. Kurtz J. Bur 1998 Nature 394 251
20. Serbin M. Gu 2006 Opt. Express 14 3563
21. Chutinan S. Noda 1998 Phys. Rev. B 57 R2006 R2008
22. Feigel M. Veinger B. Sfez A. Arsh M. Klebanov V. Lyubin 2003 Appl. Phys. Lett. 83 4480 4482
23. R. Hsiao J. Carr 1998 Mat. Sci. Eng. B 52 63
24. R. Hsiao 1999 IBM J. Res. Dev. 43 89
25. L. Chen, G.S. Mathad, European Patent EP0151948 (1985)