Direct fabrication of micro/nano fluidic channels by electron beam lithography

Microelectronic Engineering

Volumn 86, Issue 4-6, 2009, Pages 1314-1316

  Koller, Daniel M ^a   Galler, Nicole ^a   Ditlbacher, Harald ^a   Hohenau, Andreas ^a   Leitner, Alfred ^a   Aussenegg, Franz R ^a   Kren, Joachim R ^a  

^a UNIVERSITY OF GRAZ   (Austria)

Author keywords

3D Mask fabrication; e beam lithography; Micro fluidic; Micro fluidic channel; Nano fluidic; SU 8

Indexed keywords

3D MASK FABRICATION; E-BEAM LITHOGRAPHY; MICRO FLUIDIC; MICRO FLUIDIC CHANNEL; NANO FLUIDIC; SU-8;

ELECTRON BEAMS; ELECTRONS; FABRICATION; FLUIDIC DEVICES; MASKS;

ELECTRON BEAM LITHOGRAPHY;

EID: 67349262752     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.11.025     Document Type: Article

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