Periodic sub-wavelength electron beam lithography defined photonic crystals for mode control in semiconductor lasers

Microelectronic Engineering

Volumn 85, Issue 5-6, 2008, Pages 758-760

  DeRose, Guy A ^a   Zhu, Lin ^a   Poon, Joyce K S ^a   Yariv, Amnon ^a   Scherer, Axel ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Electron beam lithography; Etching; Photonic crystal; Semiconductor lasers

Indexed keywords

DIFFRACTION GRATINGS; ELECTRON BEAM LITHOGRAPHY; ETCHING; SEMICONDUCTOR GROWTH; SEMICONDUCTOR LASERS; WAVEGUIDES;

OPTICAL SURFACE STRUCTURES; PROXIMITY EFFECT CORRECTION;

PHOTONIC CRYSTALS;

EID: 44149120078     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.12.030     Document Type: Article

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