A Si/glass bulk-micromachined cryogenic heat exchanger for high heat loads: Fabrication, test, and application results

Journal of Microelectromechanical Systems

Volumn 19, Issue 1, 2010, Pages 38-47

  Zhu, Weibin ^a   White, Michael J ^b   Nellis, Gregory F ^b   Klein, Sanford A ^b   Gianchandani, Yogesh B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b University of Wisconsin Madison   (United States)

Author keywords

Cryosurgery; In situ temperature sensing; Joule Thomson (J T) cooler; Micromachined heat exchanger

Indexed keywords

IN-SITU TEMPERATURE; JOULE-THOMSON; MICROMACHINED; MICROMACHINED HEAT EXCHANGER;

COOLING; COOLING SYSTEMS; CRYOSURGERY; ETHANE; HELIUM; INLET FLOW; PLATINUM; RESONANT TUNNELING; SILICON DETECTORS; TEMPERATURE MEASURING INSTRUMENTS; TEMPERATURE SENSORS; THERMAL LOAD;

HEAT EXCHANGERS;

EID: 76349094459     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2034322     Document Type: Article

References (32)

1. A. A. Gage, "Cryosurgery in the treatment of cancer," Surg. Gynecol. Obstet., vol.174, no.1, pp. 73-92, Jan. 1992.
2. Z. H. Chang, J. J. Finkelstein, and J. G. Baust, "Optimization of cryosurgi-cal instrumentation for use in minimally invasive prostate surgery," ASME Heat Transfer Div. Publ. HTD, vol.267, pp. 45-55, 1993.
3. J. Dobak, "A review of cryobiology and cryosurgery," Adv. Cryog. Eng., vol.43, pp. 889-896, 1998.
4. B. Z. Maytal, "Fast Joule-Thomson cryocycling device for cryosurgical applications," Adv. Cryog. Eng., vol.43, pp. 911-917, 1998.
5. E. D. Marquardt, R. Radebaugh, and J. Dobak, "A cryogenic catheter for treating heart arrhythmia," Adv. Cryog. Eng., vol.43, pp. 903-910, 1998.
6. B. Collaudin and N. Rando, "Cryogenicsinspace:Areviewofthe missions and of the technologies," Cryogenics, vol.40, no.12, pp. 797-819, 2000.
7. M. Klauda, T. Kässer, B. Mayer, C. Neumann, F. Schnell, B. Aminov, A. Baumfalk, H. Chaloupka, S. Kolesov, H. Piel, N. Klein, S. Schornstein, and M. Bareiss, "Superconductors and cryogenics for future communication systems," IEEE Trans. Microw. Theory Tech., vol.48, no.7, pp. 1227-1239, Jul. 2000.
8. H. J. M. ter Brake and G. F. M. Wiegerinck, "Low-power cryocooler survey," Cryogenics, vol.42, no.11, pp. 705-718, Nov. 2002.
9. W. A. Little, "Microminiature refrigeration-Small is better," Physica, vol.109 & 110B, pp. 2001-2009, 1982.
10. J. F. Burger, H. J. Holland, J. Seppenwoolde, E. Berenschot, H. J. M. ter Brake, J. Gardeniers, M. Elwenspoek, and H. Rogalla, "165 K microcooler operating with a sorption compressor and a micro-machined cold stage," in Cryocoolers, vol.11. New York: Plenum, 2001, pp. 551-560.
11. P. P. P. M. Lerou, H. J. M. ter Brake, J. F. Burger, H. J. Holland, and H. Rogalla, "Characterization of micromachined cryogenic coolers," J. Micromech. Microeng., vol.17, no.10, pp. 1956-1960, Oct. 2007.
12. P. E. Bradley, R. Radebaugh, M. Huber, M.-H. Lin, and Y. C. Lee, "Development of a mixed-refrigerant Joule-Thomson microcryocooler," in Proc. 15th Int. Cryocoolers Conf., Long Beach, CA, 2008, pp. 425-432.
13. F. P. Incropera and D. P. DeWitt, Fundamentals of Heat and Mass Transfer, 4th ed. New York: Wiley, 1996.
14. R. F. Barron, Cryogenic Heat Transfer. New York: Taylor & Francis, 1999.
15. J. C. Selby, M. L. Philpott, and M. A. Shannon, "Fabrication of meso-scopic, flexible, high pressure, microchannel heat exchangers (MHEx)," Trans. NAMRI/SME, vol.29, pp. 469-476, 2001.
16. W. Zhu, D. W. Hoch, G. F. Nellis, S. A. Klein, and Y. B. Gianchandani, "A planar glass/Si micromachining process for the heat exchanger in a J-T cryosurgical probe," in Proc. Solid-State Sens., Actuators, Microsyst. Workshop, Hilton Head Island, SC, 2006, pp. 51-55.
17. W. Zhu, M. J. White, D. W. Hoch, G. F. Nellis, S. A. Klein, and Y. B. Gianchandani, "Two approaches to micromachining Si heat exchangers for Joule-Thomson cryosurgical probes," in Proc. IEEE Conf. Micro Electro Mech. Syst., Kobe, Japan, Jan. 2007, pp. 317-320.
18. W. Zhu, M. J. White, G. F. Nellis, S. A. Klein, and Y. B. Gianchandani, "A perforated plate stacked Si/glass heat exchanger with in situ temperature sensing for Joule-Thomson coolers," in Proc. IEEE Conf. Micro Electro Mech. Syst., Tucson, AZ, Jan. 2008, pp. 844-847.
19. W. Zhu, M. J. White, G. F. Nellis, S. A. Klein, and Y. B. Gianchandani, "A Joule-Thomson cooling system with a Si/glass heat exchanger for 0.1-1 W heat loads," in Proc. 15th Int. Conf. Solid-State Sens., Actuators, Microsyst. (TRANSDUCERS), Denver, CO, Jun. 2009, pp. 2417-2420.
20. M. J. White, G. F. Nellis, S. A. Klein, W. Zhu, and Y. B. Gianchandani, "An experimentally validated numerical modeling technique for perforated plate heat exchangers," J. Heat Transfer, manuscript approved, to be published.
21. S. A. Klein and F. L. Alvarado, "EES-Engineering Equation Solver," F-Chart Software2002.
22. [Online]. Available: http://www.fchart.com
23. G. F. Nellis, "A heat exchanger model that includes axial conduction, parasitic heat loads, and property variations," Cryogenics, vol.43, no.9, pp. 523-538, Sep. 2003.
24. M. J. White, "Performance of a MEMS heat exchanger for a cryosurgical probe," M.S. thesis, Univ. Wisconsin, Madison, WI, 2008.
25. M. Madou, Fundamentals of Microfabrication. Boca Raton, FL: CRC Press, 1997.
26. F. S.-S. Chien, C.-L. Wu, Y.-C. Chou, T. T. Chen, S. Gwob, and W.-F. Hsieh, "Nanomachining of (110)-oriented silicon by scanning probe lithography and anisotropic wet etching," Appl. Phys. Lett., vol.75, no.16, pp. 2429-2431, Oct. 1999.
27. R. F. Wolffenbuttel and K. D. Wise, "Low temperature silicon wafer-to-wafer bonding using gold at eutectic temperature," Sens. Actuators A, Phys., vol.43, no.1-3, pp. 223-229, May 1994.
28. J. Mitchell, G. R. Lahiji, and K. Najafi, "Encapsulation of vacuum sensors in a wafer level package using a gold-silicon eutectic," in Proc. TRANSDUCERS, Jun. 2005, vol.1, pp. 928-931.
29. W. A. Little, "Recent developments in Joule-Thomson cooling: Gases, coolers, and compressors," in Proc. 5th Int. Cryocooler Conf., 1988, pp. 3-11.
30. M. Q. Gong, J. F. Wu, and E. G. Luo, "Performances of the mixed-gases Joule-Thomson refrigeration cycles for cooling fixed-temperature heat loads," Cryogenics, vol.44, no.12, pp. 847-857, Dec. 2004.
31. G. Nellis, C. Hughes, and J. Pfotenhauer, "Heat transfer coefficient measurements for mixed gas working fluids at cryogenic temperatures," Cryogenics, vol.45, no.8, pp. 546-556, Aug. 2005.
32. P. P. P. M. Lerou, H. J. M. ter Brake, H. J. Holland, J. F. Burger, and H. Rogalla, "Insight into clogging of micromachined cryogenic coolers," Appl. Phys. Lett., vol.90, no.6, p. 064102, Feb. 2007.