New spiral molecular drag stage design for high compression ratio, compact turbomolecular-drag pumps

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 28, Issue 4, 2010, Pages 931-936

  Giors, S ^a   Campagna, L ^a   Emelli, E ^a  

^a Varian SpA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

COMPACT DESIGNS; COMPRESSION RATIOS; HIGH COMPRESSION RATIO; HIGH VACUUM SYSTEMS; LEAKAGE EFFECTS; NEW DESIGN; PERIPHERAL SPEED; PRESSURE RANGES; PUMP DESIGN; PUMPING SPEED;

DESIGN; DRAG; POWDERS; SPEED;

PUMPS;

EID: 77954180888     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3386591     Document Type: Conference Paper

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