Computational fluid dynamic model of a tapered Holweck vacuum pump operating in the viscous and transition regimes. I. Vacuum performance

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 4, 2006, Pages 1584-1591

  Giors, S ^a,b   Colombo, E ^c   Inzoli, F ^c   Subba, F ^b   Zanino, R ^b  

^a Varian SpA   (Italy)

^b POLITECNICO DI TORINO   (Italy)

^c POLITECNICO DI MILANO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; COMPUTATIONAL FLUID DYNAMICS; MOLECULAR DYNAMICS; NAVIER STOKES EQUATIONS; VACUUM PUMPS; VISCOUS FLOW;

GAS FLOW; HOLWECK MOLECULAR DRAG PUMPS; HYBRID TURBOMOLECULAR VACUUM PUMPS; MODEL EQUATIONS;

DRAG;

EID: 33745481129     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2178362     Document Type: Article

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