Performance characteristics of single-stage disk-type drag pump

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 20, Issue 5, 2002, Pages 1621-1631

  Heo, Joong Sik ^a   Hwang, Young Kyu ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DRAG; MONTE CARLO METHODS; ROTORS; STATORS; UNSTEADY FLOW;

MOLECULAR COLLISIONS;

VACUUM PUMPS;

EID: 0036747751     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1495512     Document Type: Article

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