Pumping performance investigation of a turbobooster vacuum pump equipped with spiral-grooved rotor and inner housing by the computational fluids dynamics method

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 4, 2003, Pages 1458-1463

  Cheng, H P ^a   Chiang, M T ^a  

^a NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL FLUID DYNAMICS; COMPUTER SIMULATION; MACHINE DESIGN; MAGNETIC BEARINGS; PERFORMANCE; ROTORS; TURBOMACHINERY; VACUUM APPLICATIONS;

PUMPING PERFORMANCE; SPIRAL GROOVED ROTOR; TURBOBOOSTER VACUUM PUMP;

PUMPS;

EID: 0041528458     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1586279     Document Type: Article

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