Turbomolecular pump design for high pressure operation

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 3, 1998, Pages 1151-1156

  Spagnol, M ^a   Cerruti, R ^a   Helmer, J ^a  

^a Varian SpA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000615817     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581250     Document Type: Article

References (8)

1. W. Gaede, Ann. Phys. (Leipzig) 41, 337 (1913)
2. G. Levi, M. De Simon, and J. C. Helmer, Vacuum 46, 357 (195).
3. J. C. Helmer and G. Levi, J. Vac. Sci. Technol. A 13, 2592 (1995).
4. H. Schlichting, Boundary-Layer Theory, 7th ed. (McGraw-Hill, New York, 1987), Chap. V.
5. A. J. Chapman and W. F. Walker, Introductory Gas Dynamics (Holt, Rinehart and Winston, New York, 1971), Sec. 1.3.
6. C. Hirsch, Numerical Computation of Internal and External Flows (Wiley, New York, 1994), Vol. 2.
7. G. A. Bird, Molecular Gas Dynamics and the Simultation of Gas Flows (Oxford Science, Oxford, 1994), Chap. 12.
8. S. Dushman, in Scientific Foundations of Vacuum Technique, edited by J. M. Lafferty (1962).