Navier-Stokes modeling of a Gaede pump stage in the viscous and transitional flow regimes using slip-flow boundary conditions

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 23, Issue 2, 2005, Pages 336-346

  Giors, S ^a,b   Subba, F ^b   Zanino, R ^b  

^a Varian SpA   (Italy)

^b POLITECNICO DI TORINO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; DATA ACQUISITION; MATHEMATICAL MODELS; SENSITIVITY ANALYSIS; SHEAR STRESS; TRANSITION FLOW; VISCOSITY;

GAEDE PUMP STAGE; MODELING;

NAVIER STOKES EQUATIONS;

EID: 31144457439     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1865152     Document Type: Article

References (16)

1. S. Giors and F. Subba, J. Vac. Sci. Technol. A 22, 1828 (2004).
2. S. Chapman and T. G. Cowling, The Mathematical Theory of Non-uniform Gases, 3rd ed. (Cambridge University Press, Cambridge, 1970), Chap., p. 110.
3. M. N. Kogan, Rarefied Gas Dynamics (Plenum, New York, 1969).
4. A. Beskok and G. E. Karniadakis, J. Thermophys. Heat Transfer 8, 647 (1994).
5. R. Cerruti, M. Spagnol, and J. C. Helmer, J. Vac. Sci. Technol. A 17, 3096 (1999).
6. J. C. Helmer and G. Levi, J. Vac. Sci. Technol. A 13, 2592 (1995).
7. J. W. Daily and R. E. Nece, J. Basic Eng. 82, 217 (1960).
8. A. Randriamampianina, L. Elena, J. P. Fontaine, and R. Schiestel, Phys. Fluids 9, 1696 (1997).
9. F. Sharipov, Eur. J. Mech. B/Fluids 22, 133 (2003).
10. J. C. Maxwell, Philos. Trans. R. Soc. London 170, 169 (1879).
11. C. Cercignani and M. Lampis, Transp. Theory Stat. Phys. 1, 101 (1971).
12. O. V. Sazhin, S. F. Borisov, and F. Sharipov, J. Vac. Sci. Technol. A 19, 2499 (2001).
13. J. M. Lafferty, Foundations of Vacuum Science and Technology (Wiley, New York, 1998), Chap., p. 50.
14. FLUENT 6.1 User's Guide (Fluent Inc., Lebanon, Pennsylvania, 2003)
15. F. M. White, Viscous Fluid Flow, 2nd ed. (McGraw-Hill, Singapore, 1991), Chap., p. 106.
16. O. Boulon, R. Mathes, and J-P. Thibault, J. Vac. Sci. Technol. A 17, 2080 (1999).