Numerical modeling of the Holweck pump

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 23, Issue 5, 2005, Pages 1331-1339

  Sharipov, Felix ^a   Fahrenbach, Peter ^b   Zipp, Andreas ^b  

^a FEDERAL UNIVERSITY OF PARANÁ   (Brazil)

^b Leak Detection Applications   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; PRESSURE EFFECTS;

ANGULAR VELOCITY; HOLWECK PUMP; PRESSURE GRADIENTS;

PUMPS;

EID: 31144470748     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1991882     Document Type: Article

References (33)

1. T. Sawada and M. Nakamura, Vacuum 41, 1833 (1990).
2. H. P. Cheng, R. Y. Jou, F. Z. Chen, Y. W. Chang, M. Iwane, and T. Hanaoka, J. Vac. Sci. Technol. A 18, 543 (2000).
3. J.-S. Heo and Y.-K. Hwang, J. Vac. Sci. Technol. A 19, 656 (2001).
4. Y.-K. Hwang and J.-S. Heo, J. Vac. Sci. Technol. A 19, 662 (2001).
5. J.-S. Heo and Y.-K. Hwang, J. Vac. Sci. Technol. A 18, 1025 (2000).
6. Y. Tsuji, C. Kung, and H. Cheng, Numer. Heat Transfer, Part A 40, 73 (2001).
7. O. Boulon and R. Mathes, Vacuum 60, 73-83 (2001).
8. S. Giors and F. Subba, J. Vac. Sci. Technol. A 22, 1828 (2004).
9. E. H. Kennard, Kinetic Theory of Gases (McGraw-Hill, New York, 1938).
10. F. Sharipov and V. Seleznev, J. Phys. Chem. Ref. Data 27, 657 (1998).
11. F. Sharipov, Eur. J. Mech. B/Fluids 22, 133 (2003).
12. J. H. Ferziger and H. G. Kaper, Mathematical Theory of Transport Processes in Gases (North-Holland, Amsterdam, 1972).
13. C. Cercignani, Theory and Application of the Boltzmann Equation (Scottish Academic, Edinburgh, 1975).
14. G. A. Bird, Molecular Gas Dynamics and the Direct Simulation of Gas Flows (Oxford University Press, Oxford, 1994).
15. J.-S. Heo and Y.-K. Hwang, Vacuum 56, 133 (2000).
16. O. Boulon, R. Mathes, and J.-P. Thibault, J. Vac. Sci. Technol. A 17, 2080-2085 (1999).
17. J.-S. Heo and Y.-K. Hwang, J. Vac. Sci. Technol. A 20, 906 (2002).
18. F. Sharipov, in Rarefied Gas Dynamics, edited by, T. J. Bartel, and, M. A. Gallis, (AIP, New York, 2001), pp. 494-501.
19. F. Sharipov, in Rarfeid Gas Dynamics, edited by, A. Ketsdever, and, E. P. Muntz, (American Institute of Physics, Melville, 2003), Vol. 663, pp. 1049-1056.
20. F. Sharipov, AIAA J. 40, 2006 (2002).
21. F. Sharipov, J. Fluid Mech. 518, 35 (2004).
22. F. Sharipov and V. Seleznev, J. Vac. Sci. Technol. A 12, 2933 (1994).
23. F. Sharipov, J. Vac. Sci. Technol. A 14, 2627 (1996).
24. F. Sharipov, J. Vac. Sci. Technol. A 15, 2434 (1997).
25. F. Sharipov, J. Vac. Sci. Technol. A 17, 3062 (1999).
26. F. Sharipov, J. Micromech. Microeng. 9, 394 (1999).
27. P. L. Bhatnagar, E. P. Gross, and M. A. Krook, Phys. Rev. 94, 511 (1954).
28. F. M. Sharipov and G. M. Kremer, Eur. J. Mech. B/Fluids 15, 493 (1996).
29. F. M. Sharipov and G. M. Kremer, Transp. Theory Stat. Phys. 25, 217 (1996).
30. F. M. Sharipov and E. A. Subbotin, Z. Angew. Math. Phys. 44, 572 (1993).
31. F. Sharipov, Phys. Fluids 8, 262-268 (1996).
32. F. Sharipov, Physica A 203, 437-456 (1994).
33. F. Sharipov, Physica A 203, 457 (1994).