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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 28, Issue 4, 2010, Pages 679-683

Fabrication of Bi2 Te3 / Sb2 Te 3 and Bi2 Te3 / Bi2 Te2 Se multilayered thin film-based integrated cooling devices

(4) Xiao, Z a Hedgemen, K a Harris, M a Dimasi, E b

a ALABAMA A AND M UNIVERSITY (United States)

b BROOKHAVEN NATIONAL LABORATORY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COOLING DEVICES; HIGH EFFICIENCY; INTEGRATED CIRCUIT FABRICATION; INTEGRATED COOLING; MULTI-LAYER THIN FILM; MULTILAYER STRUCTURES; MULTILAYERED THIN FILMS; N-TYPE CONDUCTIVITY; P-TYPE CONDUCTIVITY; SOLID-STATE MICROCOOLING; SPUTTERING DEPOSITION; TEMPERATURE DIFFERENCES; THERMOELECTRIC THIN FILMS; X-RAY DIFFRACTION AND REFLECTIVITY;

COOLING; DEPOSITION; FABRICATION; FILM PREPARATION; MULTILAYER FILMS; MULTILAYERS; SEMICONDUCTING SELENIUM COMPOUNDS; SOLID STATE DEVICES; VAPOR DEPOSITION; X RAY DIFFRACTION;

TELLURIUM COMPOUNDS;

EID: 77954178097 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.3292600 Document Type: Conference Paper

Times cited : (15)

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