On-chip solid-state cooling for integrated circuits using thin-film microrefrigerators

IEEE Transactions on Components and Packaging Technologies

Volumn 28, Issue 1, 2005, Pages 65-69

  Shakouri, Ali ^a   Zhang, Yan ^a  

^a University of California Santa Cruz   (United States)

Author keywords

Microrefrigerators; Silicon chips; Thin film silicon germanium based microrefrigerators

Indexed keywords

COOLING; HETEROJUNCTIONS; OPTIMIZATION; REFRIGERATORS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; SIMULATION; THERMAL EFFECTS; THIN FILMS;

MICROREFRIGERATORS; SOLID STATE COOLING; THIN FILM SILICON GERMANIUM BASED MICROREFRIGERATORS;

INTEGRATED CIRCUITS;

EID: 15744374480     PISSN: 15213331     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCAPT.2005.843219     Document Type: Article

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