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Volumn 7718, Issue , 2010, Pages

Next-generation test equipment for micro-production

Author keywords

interferometer array; laser interferometry; low coherence interferometry; micro optics; micro optics processing; smart pixel camera

Indexed keywords

APRIORI; FEATURE SIZES; INSPECTION PROCESS; INTERFEROMETER ARRAYS; LOW COHERENCE INTERFEROMETRY; MECHANICAL DESIGN; MICRO OPTICS PROCESSING; NEW CONCEPT; OPTICAL INTERFEROMETER; PIXEL CAMERAS; SMART PIXELS; STATE OF THE ART; TEST EQUIPMENTS; TEST STATION; WAFER SIZES;

EID: 77953895717     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.855087     Document Type: Conference Paper
Times cited : (17)

References (17)
  • 1
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    • Yole Développement, Yole Développement, Lyon
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  • 3
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    • Osten, W. (ed), Taylor and Francis, New York
    • Osten, W. (ed), [Optical inspection of Microsystems], Taylor and Francis, New York, (2006)
    • (2006) Optical Inspection of Microsystems
  • 4
    • 36248934225 scopus 로고    scopus 로고
    • Multi-technique platform for dynamic and static MEMS-characterisation
    • Gastinger, K., Løvhaugen, P., Skotheim, Ø., and Hunderi, O., "Multi-technique platform for dynamic and static MEMS- characterisation", Proc. SPIE 6616, 66163K (2007)
    • (2007) Proc. SPIE , vol.6616
    • Gastinger, K.1    Løvhaugen, P.2    Skotheim, Ø.3    Hunderi, O.4
  • 5
    • 0035423968 scopus 로고    scopus 로고
    • 3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope
    • DOI 10.1016/S0143-8166(01)00040-9, PII S0143816601000409
    • Petitgrand, S., Yahiaoui, R., Danaie, K., Bosseboeuf, A., and Gilles, J.P. "3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope", Optics and Lasers in Engineering 36, 77-101 (2001) (Pubitemid 32737104)
    • (2001) Optics and Lasers in Engineering , vol.36 , Issue.2 , pp. 77-101
    • Petitgrand, S.1    Yahiaoui, R.2    Danaie, K.3    Bosseboeuf, A.4    Gilles, J.P.5
  • 7
    • 57649099460 scopus 로고    scopus 로고
    • Some answers to new challenges in optical metrology
    • Osten, W., "Some answers to new challenges in optical metrology", Proc. SPIE 7155, 715503 (2008)
    • (2008) Proc. SPIE , vol.7155 , pp. 715503
    • Osten, W.1
  • 9
    • 77953908246 scopus 로고    scopus 로고
    • Cascade Microtech, Inc., www.cmicro.com/
  • 10
    • 69949124328 scopus 로고    scopus 로고
    • Optical, mechanical and electro-optical design of an interferometric test station for massive parallel inspection of MEMS and MOEMS
    • 2009
    • Gastinger, K., et al. (2009), "Optical, mechanical and electro-optical design of an interferometric test station for massive parallel inspection of MEMS and MOEMS", Proc. SPIE 7389, 73891J (2009)
    • (2009) Proc. SPIE , vol.7389
    • Gastinger, K.1
  • 11
    • 77953890798 scopus 로고    scopus 로고
    • SMARTIEHS - A European Project for Parallel Testing of M(O)EMS
    • 2010, in print
    • Michael, S., et al. (2010), "SMARTIEHS - a European Project for Parallel Testing of M(O)EMS", Proc. SSI2010, (in print) (2010)
    • (2010) Proc. SSI2010
    • Michael, S.1
  • 15
    • 8844286053 scopus 로고    scopus 로고
    • Smart pixels for real-time optical coherence tomography
    • Beer, S., Zeller, P., Blanc, N., Lustenberger, F. and Seitz, P., "Smart pixels for real-time optical coherence tomography", Proc. SPIE 5302, 21-32 (2004)
    • (2004) Proc. SPIE , vol.5302 , pp. 21-32
    • Beer, S.1    Zeller, P.2    Blanc, N.3    Lustenberger, F.4    Seitz, P.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.