Design of a micro-optical low coherent interferometer array for the characterisation of MEMS and MOEMS

Fringe 2009 - 6th International Workshop on Advanced Optical Metrology

Volumn , Issue , 2009, Pages 611-617

  Gastinger, Kay ^a   Haugholt, Karl Henrik ^a   Røyset, Arne ^a   Albero, Jorge ^b   Zeitner, Uwe ^c   Gorecki, Christophe ^b  

^a SINTEF   (Norway)

^b FEMTO ST INSTITUTE   (France)

^c FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 77953901964     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1007/978-3-642-03051-2_104     Document Type: Conference Paper

References (7)

1. Gastinger, K., et al. (2009) Optical, mechanical and electro-optical design of an interferometric test station for massive parallel inspection of MEMS and MOEMS, Proc. SPIE 7389 (in print), 73891J
2. Beer, S., et al. (2004) Smart pixels for real-time optical coherence tomography, Proc. SPIE 5302: 21-32
3. Zemax Development Corp., www.zemax.com
4. Radtke, D. and Zeitner U.D. (2007) Laser-lithography on non-planar surfaces. Opt. Express 15: 1167-1174
5. Albero, J., et al. (2009) Fabrication of spherical microlenses by a combination of isotropic wet etching of silicon and molding techniques, Opt. Express 17: 6283-6292
6. Albero, J., et al. (2008) Si moulds for glass and polymer microlenses replication, Proc. SPIE 6992: 69920A
7. Dannberg, P., et al. (1999) Micro-optical elements and their integration to glass and optoelectronic wafers, Microsystems Technologies 6:41-47