Optical design of a DOE-based laser interferometer for inspection of MEMS/MOEMS

Fringe 2009 - 6th International Workshop on Advanced Optical Metrology

Volumn , Issue , 2009, Pages 485-488

  Jozwik M ^a   Kujawinska, M ^a   Zeitner, U D ^b   Haugholt, K H ^c  

^a WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

^b FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

^c SINTEF   (Norway)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 77953879299     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1007/978-3-642-03051-2_80     Document Type: Conference Paper

References (4)

1. www.ict-smartiehs.eu
2. Gastinger K, Kujawinska M, Lvhaugen O, Beer S, Gorecki C, Zeitner U (2008) SMARTIEHS-Smart inspection system for high-speed and multifunctional testing of MEMS and MOEMS. 14th Micro Optics Conference 2008 (MOC08) Brussels, Belgium
3. Osten W (2006) Optical inspection of Microsystems, Taylor and Francis, New York
4. Gorecki C, Jzwik M, Salbut L (2005) Multifunctional interferometric platform for on-chip testing the micromechanical properties of MEMS/MOEMS. Journal of Microlithography, Microfabrication, Microsystems 4(4): 1-10