A self-resonant micro flow velocity sensor based on a resonant frequency shift by flow-induced vibration

Journal of Micromechanics and Microengineering

Volumn 20, Issue 7, 2010, Pages

  Seo, Young Ho ^a   Kim, Byeong Hee ^a  

^a Kangwon National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AIR FLOW; AIR FLOW VELOCITY; FLOW INDUCED VIBRATIONS; FLUID DRAG FORCE; MICRO-FLOW; MICROCANTILEVER BEAMS; PZT MATERIALS; RESONANT FLOW; RESONANT FREQUENCIES; RESONANT FREQUENCY SHIFT; SILICON CANTILEVER BEAM; SURFACE STRESS; VELOCITY SENSOR;

AIR; ATOMIC FORCE MICROSCOPY; CANTILEVER BEAMS; DRAG; FLOW VELOCITY; FLUID STRUCTURE INTERACTION; FREQUENCY SHIFT KEYING; NANOCANTILEVERS; PILE FOUNDATIONS; SENSORS; VIBRATIONS (MECHANICAL);

NATURAL FREQUENCIES;

EID: 77953881807     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/7/075024     Document Type: Article

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