Biomimetic micromechanical adaptive flow-sensor arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6592, Issue , 2007, Pages

  Krijnen, Gijs ^a   Floris, Arjan ^a   Dijkstra, Marcel ^a   Lammerink, Theo ^a   Wiegerink, Remco ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Adaptation; Biomimetics; Capacitive sensing; Drag force; Flow sensors; Mechano sensory hairs; MEMS; Spring softening

Indexed keywords

BIOMIMETICS; ELECTRODES; MEMS; MICROMECHANICS; POLYSILICON; SILICON NITRIDE;

CAPACITIVE SENSING; DRAG FORCE; FLOW SENSORS; MECHANO SENSORY HAIRS; SPRING SOFTENING;

SENSOR ARRAYS;

EID: 36248946113     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.721807     Document Type: Conference Paper

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