Properties of Nb-doped ZnO transparent conductive thin films deposited by rf magnetron sputtering using a high quality ceramic target

Bulletin of Materials Science

Volumn 33, Issue 2, 2010, Pages 119-122

  Xu, J W ^a   Wang, H ^a   Jiang, M H ^a   Liu, X Y ^a  

^a GUILIN UNIVERSITY OF ELECTRONIC TECHNOLOGY   (China)

Author keywords

Magnetron sputtering; Nb doped; Optical and electrical properties; ZnO films

Indexed keywords

CERAMIC TARGET; DOPED ZNO; FOUR-POINT PROBE TECHNIQUES; GLASS SUBSTRATES; HIGH QUALITY; LOW RESISTIVITY; OPTICAL AND ELECTRICAL PROPERTIES; OPTICAL TRANSMISSION SPECTRUM; RF-MAGNETRON SPUTTERING; ROOM TEMPERATURE; SEM; SURFACE FIGURE; TRANSPARENT CONDUCTIVE THIN FILMS; VACUUM-ANNEALING; VISIBLE REGION; ZNO FILMS;

CONDUCTIVE FILMS; LIGHT TRANSMISSION; MAGNETRON SPUTTERING; METALLIC FILMS; OPTICAL PROPERTIES; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; VACUUM; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

ELECTRIC PROPERTIES;

EID: 77953854598     PISSN: 02504707     EISSN: None     Source Type: Journal    
DOI: 10.1007/s12034-010-0016-x     Document Type: Article

References (20)

1. Cao F et al 2009 Chin. Phys. Lett. 26, 034210
2. Cao H T et al 2004 Surf. Coat. Technol. 184, 84
3. J Cui Y G et al 2005 J. Cryst. Growth 282, 389
4. Dang W L et al 2007 Superlattice Microstr. 42, 89
5. Fujimura N et al 1993 J. Cryst. Growth 130, 430
6. Han J, Mantas P Q and Senos A M R 2002 J. Eur. Ceram. Soc. 22, 49
7. Hsieh P T et al 2007 Physica B 392, 332
8. Joseph M et al 2001 Physica B302-303 140
9. Kim K J and Park Y R 2002 Appl. Phys. Lett. 81, 1420
10. Lin W et al 2008 Rare Metals 27, 32
11. Minami T, Suzuki S and Miyata T 2001 Thin Solid Films 398-399 53
12. Moustaghfir A, Tomasella E and Amor S B 2003 Surf. Coat. Technol. 174-175 193
13. Özgü Ü et al 2005 J. Appl. Phys. 98, 041301
14. Paraguay F et al 1999 Thin Solid Films 350, 192
15. Saito K et al 2007 Superlattice Microstr. 42, 172
16. Sarkar A et al 1991 Thin Solid Films 204, 255
17. Srikant V and Clarke D R 1998 J. Appl. Phys. 83, 5447
18. Srikant V, Sergo V and Clarke D R 1995 Appl. Phys. Lett. 36, 318
19. Swanepoel R 1983 J. Phys. E: Sci. Instrum. 16, 1214
20. Tang Z K et al 1998 Appl. Phys. Lett. 72, 3270