Preparation and characterization of transparent conductive Nb-doped ZnO Films by radio-frequency sputtering

Chinese Physics Letters

Volumn 26, Issue 3, 2009, Pages

  Cao, Feng ^a   Wang, Yi Ding ^a   Liu, Da Li ^a   Yin, Jing Zhi ^a   Guo, Bao Jia ^a   Li, Lei ^a   An, Yu Peng ^a  

^a JILIN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVE FILMS; FIELD EMISSION MICROSCOPES; FILM PREPARATION; II-VI SEMICONDUCTORS; LIGHT TRANSMISSION; MAGNETRON SPUTTERING; NIOBIUM COMPOUNDS; OPTICAL FILMS; OPTICAL PROPERTIES; SUBSTRATES; X RAY DIFFRACTION; ZINC OXIDE; ZINC SULFIDE;

DOPED ZNO; GLASS SUBSTRATES; NB DOPED; R.F. SPUTTERING; RADIO FREQUENCY SPUTTERING; RF-SPUTTERING; SPUTTERING POWER; TRANSPARENT CONDUCTIVE; TRANSPARENT CONDUCTIVE FILMS; ZNO FILMS;

SCANNING ELECTRON MICROSCOPY;

EID: 66149107080     PISSN: 0256307X     EISSN: 17413540     Source Type: Journal    
DOI: 10.1088/0256-307X/26/3/034210     Document Type: Article

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