Metallic coatings of microelectromechanical structures at low temperatures: Stress, elasticity, and nonlinear dissipation

Journal of Applied Physics

Volumn 107, Issue 11, 2010, Pages

  Collin, E ^a   Kofler, J ^a   Lakhloufi, S ^a   Pairis, S ^a   Bunkov, Yu M ^a   Godfrin, H ^a  

^a LABORATOIRE DE CRISTALLOGRAPHIE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ADDITIONAL MASS; ANELASTICITY; COATING LAYER; CONTROL PARAMETERS; CRYOGENIC VACUUM; DYNAMIC RANGE; KEY PARAMETERS; LOW TEMPERATURE TECHNIQUES; LOW TEMPERATURES; MECHANICAL MEASUREMENTS; MECHANICAL RESONANCE; METALLIC COATING; METALLIC LAYERS; MICROELECTROMECHANICAL STRUCTURES; NONLINEAR DISSIPATION; PHASE-RESOLVED MEASUREMENTS; SURFACE STRESS; THEORETICAL EXPRESSION; THIN METALLIC FILMS; UNDERLYING MECHANISM;

ACCESS CONTROL; ALUMINUM COATINGS; CONTROL SYSTEM ANALYSIS; DYNAMICS; ELASTICITY; HARD COATINGS; NIOBIUM; NIOBIUM OXIDE; STRESSES; SURFACE PROPERTIES;

MECHANICAL PROPERTIES;

EID: 77953645802     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3391901     Document Type: Article

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