Influence of surface stress on the resonance behavior of microcantilevers

Applied Physics Letters

Volumn 87, Issue 5, 2005, Pages

  McFarland, Andrew W ^a   Poggi, Mark A ^b   Doyle, Margaret J ^b   Bottomley, Lawrence A ^b   Colton, Jonathan S ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BENDING RESONANT; FREQUENCY OF MICROCANTILEVERS; RESONANT FREQUENCY; SURFACE STRESS;

FREQUENCIES; MEASUREMENTS; STRESSES; SURFACE PROPERTIES;

RESONANCE;

EID: 33645508730     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2006212     Document Type: Article

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