Identification of optimized Ti-Ni-Cu shape memory alloy compositions for high-frequency thin film microactuator applications

Smart Materials and Structures

Volumn 19, Issue 6, 2010, Pages

  Zarnetta, R ^a   Ehmann, M ^a   Savan, A ^a   Ludwig, A ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER DEFLECTION; COMBINATORIAL METHOD; COMPOSITION RANGES; FIGURE OF MERIT; FUNCTIONAL PROPERTIES; HIGH FREQUENCY HF; OPTIMAL COMPOSITION; R-PHASE TRANSFORMATIONS; RECOVERY STRESS; SHAPE MEMORY ALLOY; SHAPE MEMORY THIN FILMS; SHAPE-MEMORY PROPERTIES; TEMPERATURE INTERVALS; THERMAL HYSTERESIS; TI-NI-CU; TRANSFORMATION TEMPERATURES;

COPPER; COPPER ALLOYS; OPTIMIZATION; THIN FILMS;

TITANIUM ALLOYS;

EID: 77953564892     PISSN: 09641726     EISSN: 1361665X     Source Type: Journal    
DOI: 10.1088/0964-1726/19/6/065032     Document Type: Article

References (34)

1. Krulevitch P, Lee A P, Ramsey P B, Trevino J C, Hamilton J and Northrup M A 1996 Thin film shape memory alloy microactuators J. Microelectromech. Syst. 5 270-82 (Pubitemid 126607096)
2. Quandt E, Halene C, Holleck H, Feit K, Kohl M, Schlomacher P, Skokan A and Skrobanck K D 1996 Sputter deposition of TiNi, TiNiPd and TiPd films displaying the two-way shape-memory effect Sensors Actuators A 53 434-9
3. Kohl M, Dittmann D, Quandt E and Winzek B 2000 Thin film shape memory microvalves with adjustable operation temperature Sensors Actuators A 83 214-9
4. Fu Y Q, Du H J, Huang W M, Zhang S and Hu M 2004 TiNi-based thin films in MEMS applications: a review Sensors Actuators A 112 395-408
5. Fu Y Q, Luo J K, Ong S E, Zhang S, Flewitt A J and Milne W I 2008 A shape memory microcage of TiNi/DLC films for biological applications J. Micromech. Microeng. 18 035026
6. Bellouard Y 2008 Shape memory alloys for microsystems: a review from a material research perspective Mater. Sci. Eng. A 481/482 582-9
7. Vitushinsky R, Schmitz S and Ludwig A 2009 Bistable thin-film shape memory actuators for applications in tactile displays J. Microelectromech. Syst. 18 186-94
8. Ludwig A, Zarnetta R, Hamann S, Savan A and Thienhaus S 2008 Development of multifunctional thin films using high-throughput experimentation methods Int. J. Mater. Res. 99 1144-9
9. Cui J et al 2006 Combinatorial search of thermoelastic shape-memory alloys with extremely small hysteresis width Nat. Mater. 5 286-90
10. Löbel R, Thienhaus S, Savan A and Ludwig A 2008 Combinatorial fabrication and high-throughput characterization of a Ti-Ni-Cu shape memory thin film composition spread Mater. Sci. Eng. A 481/482 151-5
11. 16 shape memory thin films and bulk alloys discovered by combinatorial methods Acta Mater. 57 4169-77
12. Ludwig A, Cao J, Savan A and Ehmann M 2007 High-throughput characterization of hydrogen storage materials using thin films on micromachined Si substrates J. Alloys Compounds 446/447 516-21
13. Ludwig A, Cao J, Brugger J and Takeuchi I 2005 MEMS tools for combinatorial materials processing and high-throughput characterization Meas. Sci. Technol. 16 111-8 (Pubitemid 40133870)
14. Takeuchi I et al 2003 Identification of novel compositions of ferromagnetic shape-memory alloys using composition spreads Nat. Mater. 2 180-4
15. Lehnert T, Grimmer H, Böni P, Horisberger M and Gotthardt R 2000 Characterization of shape-memory alloy thin films made up from sputter-deposited Ni/Ti multilayers Acta Mater. 48 4065-71
16. Cho H, Kim H Y and Miyazaki S 2005 Fabrication and characterization of Ti-Ni shape memory thin film using Ti/Ni multilayer technique Sci. Tech. Adv. Mater. 6 678-83
17. Zarnetta R, Zelaya E, Eggeler G and Ludwig A 2009 Influence of precipitates on the thermal hysteresis of Ti-Ni-Pd shape memory thin films Scr. Mater. 60 352-5
18. Timoshenko S 1925 Analysis of bi-metal thermostats J. Opt. Soc. Am. 11 233-56
19. Craciunescu C M, Li J and Wuttig M 2003 Constrained martensitic transformations in TiNiCu films Thin Solid Films 434 271-5
20. Grummon D S, Zhang J and Pence T J 1999 Relaxation and recovery of extrinsic stress in sputtered titanium-nickel thin films on (100)-Si Mater. Sci. Eng. A 273-275 722-6
21. Ishida A, Sato M and Ogawa K 2008 Microstructure and shape memory behavior of annealed Ti-36.8at.% Ni-11.6at.% Cu thin film Mater. Sci. Eng. A 481/482 91-4
22. (1-x). 2. Displacive transformations Phil. Mag. A 76 191-219 (Pubitemid 127339129)
23. x alloys Mater. Sci. Forum 56-58 599-604
24. Fukuda T, Kitayama M, Kakeshita T and Saburi T 1996 Martensitic transformation behavior of a shape memory Ti-40.5Ni-10Cu alloy affected by the C11(b)-type precipitates Mater. Trans., JIM 37 1540-6
25. 22.0) thin films Mater. Sci. Eng. A 332 47-55
26. Zarnetta R, Savan A, Thienhaus S and Ludwig A 2007 Combinatorial study of phase transformation characteristics of a Ti-Ni-Pd shape memory thin film composition spread in view of microactuator applications Appl. Surf. Sci. 254 743-8
27. Roytburd A L, Kim T S, Su Q, Slutsker J and Wuttig M 1998 Martensitic transformation in constrained films Acta Mater. 46 5095-107
28. Tomozawa M, Okutsu K, Kim H Y and Miyazaki S 2005 Characterization of high-speed microactuator utilizing shape memory alloy thin films Mater. Sci. Forum 475-479 2037-42
29. Winzek B and Quandt E 1999 Shape-memory Ti-Ni-X-films (X = Cu, Pd) under constraint Z. Metallk. 90 796-802
30. Grossmann C, Frenzel J, Sampath V, Depka T and Eggeler G 2009 Elementary transformation and deformation processes and the cyclic stability of NiTi and NiTiCu shape memory spring actuators Metall. Mater. Trans. 11 2530-44
31. Tomozawa M, Kim H Y and Miyazaki S 2006 Microactuators using R-phase transformation of sputter-deposited Ti-47.3Ni shape memory alloy thin films J. Intell. Mater. Syst. Struct. 17 1049-58
32. Ishida A, Sato M, Tabata O and Yoshikawa W 2005 Shape memory thin films formed with carrousel-type magnetron sputtering apparatus Smart Mater. Struct. 14 S216-22
33. Craciunescu C, Li J and Wuttig M 2003 Thermoelastic stress-induced thin film martensites Scr. Mater. 48 65-70
34. Zamponi C, Wuttig M and Quandt E 2007 Ni-Ti-Ag shape memory thin films Scr. Mater. 56 1075-7