Bistable thin-film shape memory actuators for applications in tactile displays

Journal of Microelectromechanical Systems

Volumn 18, Issue 1, 2009, Pages 186-194

  Vitushinsky, Roman ^a,b   Schmitz, Sam ^a   Ludwig, Alfred ^a,c  

^a CENTER OF ADVANCED EUROPEAN STUDIES AND RESEARCH CAESAR   (Germany)

^b HOLST CENTRE   (Netherlands)

^c RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

Bistable actuators; Shape memory alloys (SMAs); Tactile display; Thin film actuators

Indexed keywords

ALLOYS; BEAMS AND GIRDERS; COPPER; DISPLAY DEVICES; HAFNIUM; MANGANESE COMPOUNDS; METALLIC COMPOUNDS; MICE (COMPUTER PERIPHERALS); RANGE FINDING; SHAPE MEMORY EFFECT; THIN FILM DEVICES; TITANIUM ALLOYS;

ACTUATION VOLTAGES; BI STABLES; BISTABLE ACTUATORS; LATERAL DIMENSIONS; MICRO SYSTEM TECHNOLOGIES; PLANAR SUBSTRATES; SHAPE MEMORY ACTUATORS; SHAPE MEMORY ALLOYS (SMAS); STRUCTURED SUBSTRATES; TACTILE DISPLAY; TACTILE GRAPHIC DISPLAYS; TEST SETUPS; THIN-FILM ACTUATORS; TI-NI-CU;

ACTUATORS;

EID: 60449111074     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.2009816     Document Type: Article

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