Crystallized Nano-thick TiO2 films with low temperature ALD process

Journal of Korean Institute of Metals and Materials

Volumn 48, Issue 5, 2010, Pages 449-455

  Park, Jongsung ^a   Han, Jeungjo ^a   Song, Ohsung ^a  

^a University of Seoul   (South Korea)

Author keywords

ALD; Crystallization; Deposition; TEM; Thin films

Indexed keywords

EID: 77953497183     PISSN: 17388228     EISSN: None     Source Type: Journal    
DOI: 10.3365/KJMM.2010.48.05.449     Document Type: Article

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