Analysis, simulation, and experimental studies of YAG and CO2 laser-produced plasma for EUV lithography sources

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7636, Issue , 2010, Pages

  Hassanein, A ^a   Sizyuk, V ^a   Harilal, S S ^a   Sizyuk, T ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

CO2 Laser; Debris mitigation; DPP; EUV; HEIGHTS; LPP

Indexed keywords

COLLECTION SYSTEMS; DEBRIS GENERATION; DEBRIS MITIGATION; DENSITY VALUE; DISCHARGE-PRODUCED PLASMAS; EUV LITHOGRAPHY; EUV RADIATION; EUV SOURCE; EXPERIMENTAL FACILITIES; EXPERIMENTAL STUDIES; HIGH REFLECTIVITY; HIGH VOLUME MANUFACTURING; HIGH-POWER; LASER SYSTEMS; LPP SOURCES; ND : YAG LASERS; PLASMA PLUMES; PLASMA PROPERTIES; TARGET PARAMETER; TEMPORAL PROFILE; YAG;

COMPUTER SIMULATION; CONVERSION EFFICIENCY; DEBRIS; ELECTRIC DISCHARGES; EXTREME ULTRAVIOLET LITHOGRAPHY; LASER PRODUCED PLASMAS; LIGHT SOURCES; LITHOGRAPHY; NEODYMIUM; OPTIMIZATION; REFLECTION; SOLID STATE LASERS; TARGETS; TIN; TITANIUM COMPOUNDS; ULTRAVIOLET LASERS;

NEODYMIUM LASERS;

EID: 77953459472     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.848222     Document Type: Conference Paper

References (11)

1. Fomenkov, I. V., Brandt, D. C., Bykanov, A. V., Ershov, A. I., Partlo, W. N., Myers, D. W., Böwering, N. R., Farrar, N. R., Vaschenko, G. O., Khodykin, O. V., Hoffman, J. R., Chrobak, C. P., Srivastava, S. N., Golich, D. J., Vidusek, D. A., De Dea, D., and Hou, R. R., "Laser-Produced Plasma Light Source for EUVL", Emerging Lithographic Technologies XII, Proc. of SPIE 7271-38 (2009).
2. Harilal, S. S., Coons, R. W., Hough, P., and Hassanein, A., "Influence of spot size on extreme ultraviolet efficiency of laser-produced Sn plasmas," Applied Physics Letters 95, 221501 (2009).
3. Hassanein, A., Sizyuk, V., Sizyuk, T., and Harilal, S. S., "Effects of Plasma Spatial Profile on Conversion efficiency of Laser-Produced Plasma Sources for EUV lithography," J. Micro/Nanolith. MEMS MOEMS 8, 041503 (2009).
4. Tao, Y., Tillack, M. S., Sequoia, K. L., Burdt, R. A., Yuspeh, S., and Najmabadi, F., "Efficient 13.5 nm extreme ultraviolet emission from Sn plasma irradiated by a long CO2 laser pulse," Applied Physics Letters 92, 251501 (2008).
5. Takahashi, A., Nakamura, D., Tamaru, A., Akiyama, T., and Okada, T., "Comparative study on EUV and debris emission from CO2 and Nd: YAG laser-produced tin plasmas," Journal of Physics: Conference Series 112, 042059 (2008).
6. 2 and YAG laser-produced tin plasmas", these proceedings.
7. Coons, R. W., Campos, D., Crank, M., Harilal, S. S., and Hassanein, A., "Comparison of EUV spectral and ion emission features from laser-produced Sn and Li plasmas", these proceedings.
8. Hassanein, A., Sizyuk, V., and Sizyuk, T., "Multidimensional simulation and optimization of hybrid laser and discharge plasma devices for EUV lithography," Proc. of SPIE 6921, 92113 (2008).
9. Sizyuk, V., Hassanein, A., Morozov, V., Tolkach, V., Sizyuk, T., and Rice, B., "Numerical simulation of laser-produced plasma devices for EUV lithography using the heights integrated model," Numerical Heat Transfer Part a-Applications 49, 215-236 (2006). (Pubitemid 43065434)
10. Johnston, T. W., and Dawson, J. M., "Correct values for high-frequency power absorption by inverse bremsstrahlung in plasmas," Phys. Fluids 16, 722 (1973).
11. Hurst, N., and Harilal, S. S., "Pulse shaping of transversely excited atmospheric CO2 laser using a simple plasma shutter," Review of Scientific Instrumentation 80, 035101 (2009).