Comparative study on EUV and debris emission from CO2 and Nd: YAG laser-produced tin plasmas

Journal of Physics: Conference Series

Volumn 112, Issue Part 4, 2008, Pages

  Takahashi, A ^a   Nakamura, D ^b   Tamaru, K ^b   Akiyama, T ^b   Okada, T ^b  

^a KYUSHU UNIVERSITY   (Japan)

^b Department of Electrical and Electronic System Engineering ^*  (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON DIOXIDE; DEBRIS; DROPS; EXTREME ULTRAVIOLET LITHOGRAPHY; FUSION REACTIONS; INERTIAL CONFINEMENT FUSION; IONS; KINETIC ENERGY; KINETICS; LASER FUSION; LIGHT SOURCES; QUARTZ CRYSTAL MICROBALANCES; TIN;

ABSORBED ENERGY; COMPARATIVE STUDIES; DROPLET EMISSIONS; EMISSION CHARACTERISTICS; ION KINETIC ENERGY; LASER-PRODUCED TIN PLASMAS; LONG WAVELENGTH; TARGET MATERIALS;

NEODYMIUM LASERS;

EID: 77953371914     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/112/4/042059     Document Type: Conference Paper

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4. Takahashi A and Nishijima K 1995 Japan. J. Appl. Phys. 34 2471