Radio frequency dual magnetron sputtering deposition and characterization of nanocomposite Al2 O3 -Zr O2 thin films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 2, 2006, Pages 309-316

  Trinh, D H ^a   Hogberg H ^a   Andersson, J M ^a   Collin, M ^b   Reineck, I ^b   Helmersson, U ^a   Hultman, L ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

^b Sandvik Tooling   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; AMORPHOUS MATERIALS; CHARACTERIZATION; COMPOSITION; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; ZIRCONIA;

AMORPHOUS TISSUES; ELASTIC RECOIL DETECTION ANALYSIS; INTRACOLUMNAR STRUCTURES;

THIN FILMS;

EID: 33644514978     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2171709     Document Type: Article

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