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Applied Physics Letters

Volumn 96, Issue 20, 2010, Pages

Frequency-dependent stability of parallel-plate electrostatic actuators in conductive fluids

(3) Sounart, T L a,d Panchawagh, H V b,e Mahajan, R L c

a SANDIA NATIONAL LABORATORIES (United States)

b UCB 450 (United States)

c VIRGINIA POLYTECHNIC INSTITUTE AND STATE UNIVERSITY (United States)

d INTEL CORPORATION (United States)

e EASTMAN KODAK COMPANY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVE FLUIDS; DEPENDENT STABILITY; DIELECTRIC MEDIA; ELECTROMECHANICAL STABILITY; FREQUENCY-DEPENDENT; PARALLEL-PLATE ELECTROSTATIC ACTUATORS; PULL-IN; PULL-IN INSTABILITY; RANGE OF MOTIONS; STABILITY LIMIT;

ACTUATORS; ELECTROSTATICS; MICROELECTROMECHANICAL DEVICES; STABILITY;

ELECTROSTATIC ACTUATORS;

EID: 77952971370 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3389491 Document Type: Article

Times cited : (13)

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- See supplementary material at E-APPLAB-96-041015 for a magnified view of the partial stability region and Vns versus X curves at selected values of ρ
- See supplementary material at http://dx.doi.org/10.1063/1.3389491 E-APPLAB-96-041015 for a magnified view of the partial stability region and Vns versus X curves at selected values of ρ.

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