Pull-in instability of parallel-plate electrostatic microactuators under a combined variable charge and voltage configuration

Applied Physics Letters

Volumn 92, Issue 1, 2008, Pages

  Son, C ^a   Ziaie, B ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC DEVICES; ELECTROSTATIC DEVICES; PARALLEL PROCESSING SYSTEMS; VOLTAGE CONTROL;

COMBINED VARIABLE CHARGES; VOLTAGE CONFIGURATIONS; VOLTAGE CONTROLLED ELECTROSTATIC ACTUATORS;

MICROACTUATORS;

EID: 38049042202     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2832770     Document Type: Article

References (7)

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