Mixed LTCC and LTTT technology for microplasma generator fabrication

Journal of Microelectronics and Electronic Packaging

Volumn 6, Issue 2, 2009, Pages 101-107

  Yamamoto, Roberto K ^a,b   Gongora Rubio, Mário R ^c   Pessoa, Rodrigo S ^d   Cunha, Márcio R ^c   Maciel, Homero S ^a  

^a FACULDADE DE TECNOLOGIA DE SÃO PAULO   (Brazil)

^b UNIVERSITY OF SÃO PAULO   (Brazil)

^c Instituto de Pesquisas Tecnologicas   (Brazil)

^d INSTITUTO TECNOLÓGICO DE AERONÁUTICA   (Brazil)

Author keywords

Ceramic tape; Green tape; LTCC; LTTT

Indexed keywords

CERAMIC MATERIALS; ELECTRIC DISCHARGES; ELECTRODES; EMISSION SPECTROSCOPY; GLOW DISCHARGES; METAMATERIALS; MICROELECTRONICS; MICROFLUIDICS; NITROGEN; PLASMA DEVICES; PLATES (STRUCTURAL COMPONENTS); SULFUR HEXAFLUORIDE; TEMPERATURE;

CERAMIC TAPES; GREEN TAPE; LTCC; LTCC (LOW TEMPERATURE CO-FIRED CERAMIC); LTTT; MICRO FLUIDIC APPLICATIONS; MICROPLASMA DEVICES; OPTICAL EMISSION SPECTRA;

FABRICATION;

EID: 77952955389     PISSN: 15514897     EISSN: None     Source Type: Journal    
DOI: 10.4071/1551-4897-6.2.101     Document Type: Review

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