Meso-scale remote plasma generator using LTCC technology

Proceedings - 2005 IMAPS/ACerS 1st International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2005

Volumn , Issue , 2005, Pages 272-278

  Yamamoto, Roberto K ^a,b   Verdonck, Patrick B ^b   Gongora Rubio, Mario R ^b,c  

^a FACULDADE DE TECNOLOGIA DE SÃO PAULO   (Brazil)

^b UNIVERSITY OF SÃO PAULO   (Brazil)

^c Instituto de Pesquisas Tecnologicas   (Brazil)

Author keywords

Glow discharge; LTCC machining; Meso scale plasma; Remote plasma

Indexed keywords

CONVENTIONAL SYSTEMS; ELECTRON ENERGIES; GAS DISTRIBUTION; LTCC TECHNOLOGY; MESOSCALE; PLASMA GENERATOR; REACTIVE SPECIES; REMOTE PLASMAS;

CERAMIC MATERIALS; ELECTRODES; EMISSION SPECTROSCOPY; EXHIBITIONS; GLOW DISCHARGES; MICROCHANNELS; MICROSYSTEMS; PLASMA DEVICES; PLASMA JETS;

PLASMAS;

EID: 33745786326     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

1. H. Yoshiki et al., "Inner Wall Modification of a Poly(ethylene terephthalate) (PET) Capillary by 13.56 MHz Capacitively Coupled Microplasma", Thin Solid Films. Vol. 407, pp. 156-162, 2002.
2. M. Laroussi et al., "Biological Decontamination by Nonthermal Plasmas", IEEE Trans, on Plasma Science, Vol. 28, No. 1, pp. 184-188, Feb., 2000.
3. A. E. Dubinov et al., "Effect of Glow Discharge Air Plasma on Grain Crops Seed", IEEE Trans, on Plasma Science, Vol. 28. No. 1, pp. 180-183. Feb., 2000.
4. I. S. Choi et al., "Application of Medium Frequency Atmospheric Plasma on Continuous Aluminum Wire Cleaning for Magnet Wire Manufacturing", Surface and Coatings Tech., Vol. 142- 144, pp. 300-305, 2001.
5. R. Foest et al., "Study of an Atmospheric Pressure Glow Discharge (APG) for Thin Film Deposition", Surface and Coatings Tech., Vol. 163, 164, pp. 323-330, 2003.
6. X. Xu, "Dielectric Barrier Discharge - Properties and Applications", Thin Solid Films, Vol. 390. pp. 237-242. 2001.
7. K. H. Gericke et al., "Microstructured Electrodes as a means of Creating Uniform Discharges at Atmospheric Pressure", Vacuum. Vol. 65, pp. 291-297, 2002.
8. L. Baars-Hibbe et al., "Micro-Structured Electrode Arrays: Atmospheric Pressure Plasma Processes and Applications", Surface and Coatings Tech., Vol. 174, 175. pp. 519-523, March, 2003.
9. C. Penache et al., "Experimental Study of High Pressure Glow Discharges Based on MSE Arrays", Proc. Vllth Int. Symp. High Pressure Low Temp. Plasma Cliem., 2000.
10. Espinoza-Vallejos P. et al., "The Measurement and Control of Sagging in Meso (Intermediate Scale) Electromechanical LTCC Structures", In: MRS Fall Meeting, Mat. Res. Soc. Conf. Proc., Boston. Mass, USA. Vol. 518, pp. 73-79. 1998.
11. Peterson K. A. et al., "Microsystem Integration with New Techniques in LTCC", In: Proc. of IMAPS Conf. and Exhib. on Ceramic Intercon. Tech., April 26-28, Denver, Colorado, 2004.
12. M. R. Gongora-Rubio et al., "Overview of Low Temperature Co-fired Ceramics Tape Technology for Meso-System Technology (MsST)", Sensors and Actuators A. Vol. 89. pp. 222-241, 2001.