Fabrication of planarized discrete track media using gas cluster ion beams

IEEE Transactions on Magnetics

Volumn 46, Issue 6, 2010, Pages 1599-1602

  Toyoda, Noriaki ^a   Hirota, Tomokazu ^a   Yamada, Isao ^a   Yakushiji, Hiroshi ^b   Hinoue, Tatsuya ^b   Ono, Toshinori ^b   Matsumoto, Hiroyuki ^b  

^a UNIVERSITY OF HYOGO   (Japan)

^b HITACHI LTD   (Japan)

Author keywords

Discrete track media; Gas cluster ion beam; Planarization

Indexed keywords

ACOUSTIC EMISSION TESTING; BINARY ALLOYS; CHROMIUM ALLOYS; CHROMIUM METALLOGRAPHY; ETCHING; ION BEAM ASSISTED DEPOSITION; ION BEAMS; IONS; NANOIMPRINT LITHOGRAPHY; TITANIUM ALLOYS; TITANIUM METALLOGRAPHY;

BIT-PATTERNED MEDIA (BPM); DISCRETE TRACK MEDIA; GAS CLUSTER ION BEAMS; ION BEAM ETCHING; LINE-AND-SPACE PATTERNS; MAGNETIC CHARACTERISTIC; MAGNETIC FORCE MICROSCOPES; PLANARIZATION;

FABRICATION;

EID: 77952854290     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2010.2048748     Document Type: Article

References (8)

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