Surface microscopy with laserless MEMS based afm probes

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 292-295

  Algre E ^a   Legrand, Bernard ^a   Faucher, M ^a   Walter, B ^a   Buchaillot, L ^a  

^a INSTITUT D ELECTRONIQUE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AFM; AFM IMAGING; AFM PROBE; ATOMIC FORCE MICROSCOPES; BULK-MODE; CAPACITIVE TRANSDUCERS; EXPERIMENTAL CONDITIONS; FORCE CURVE; INTEGRATED SENSING; MICROSCOPY IMAGES; NANOSCALE TIP; NEW CONCEPT; SILICON RESONATORS; SILICON RING RESONATOR; SURFACE MICROSCOPY;

MECHANICAL ENGINEERING; MECHANICS; PROBES; REACTIVE ION ETCHING; RESONATORS;

ATOMIC FORCE MICROSCOPY;

EID: 77952757290     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442509     Document Type: Conference Paper

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10. www.veeco.com
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