Tip-matter interaction measurements using MEMS ring resonators

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 1638-1641

  Algre E ^a   Legrand, B ^a   Faucher, M ^a   Walter, B ^a   Buchaillot, L ^a  

^a Institut Superieur de l'Electronique et du Numerique   (France)

Author keywords

AFM; MEMS; Ring silicon resonators

Indexed keywords

AFM; ATOMIC FORCE MICROSCOPES; BULK-MODE; ELECTRICAL RESPONSE; FORCE SPECTROSCOPY; MEMS RESONATORS; NEW CONCEPT; OSCILLATION AMPLITUDE; OUTPUT SIGNAL; RING RESONATOR; SILICON RESONATORS; SURFACE MATERIALS; TIP-SURFACE INTERACTION;

ACOUSTIC RESONATORS; ACTUATORS; ATOMIC FORCE MICROSCOPY; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; PIEZOELECTRIC TRANSDUCERS; PROBES; RESONATORS; SURFACES;

SOLID-STATE SENSORS;

EID: 71449097052     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285774     Document Type: Conference Paper

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