Raman mapping of microcrystalline silicon thin films with high spatial resolution

Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 7, Issue 3-4, 2010, Pages 704-707

  Ledinsky M ^a   Vetushka, A ^a   Stuchlik J ^a   Fejfar, A ^a   Kocka J ^a  

^a INSTITUTE OF PHYSICS   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

785 NM LASERS; AFM; AMORPHOUS MATRICES; CONDUCTIVE ATOMIC FORCE MICROSCOPES; CRYSTALLOGRAPHIC ORIENTATIONS; EXCITATION LASERS; FIELD OF VIEWS; HIGH SPATIAL RESOLUTION; MICROCRYSTALLINE GRAINS; MICROCRYSTALLINE SILICON THIN FILMS; MIXED PHASE; OPTICAL MICROSCOPES; POLARIZED RAMAN SPECTROSCOPY; RAMAN MAPPING; RAMAN MAPS; RAMAN MEASUREMENTS; RESOLUTION LIMITS; SILICON THIN FILM; THERMAL OXIDATION; THIN FILM SURFACES;

ATOMIC FORCE MICROSCOPY; LASER EXCITATION; MAPPING; MICROCRYSTALLINE SILICON; MICROSCOPES; RAMAN SCATTERING; RAMAN SPECTROSCOPY; SEMICONDUCTOR LASERS; THIN FILMS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 77952575354     PISSN: 18626351     EISSN: 16101642     Source Type: Journal    
DOI: 10.1002/pssc.200982832     Document Type: Conference Paper

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