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Volumn 7, Issue 3-4, 2010, Pages 790-792

Preparations of P- and N-doped hydrogenated microcrystalline cubic silicon carbide films by VHF plasma enhanced chemical vapor deposition method for Si thin film solar cells

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION METHODS; CUBIC SILICON CARBIDE; DARK CONDUCTIVITY; DOPED MATERIALS; N-DOPED; N-TYPE DOPING; THIN FILM SOLAR CELLS; VHF PLASMA; X-RAY DIFFRACTION MEASUREMENTS;

EID: 77952572866     PISSN: 18626351     EISSN: 16101642     Source Type: Journal    
DOI: 10.1002/pssc.200982732     Document Type: Conference Paper
Times cited : (7)

References (11)
  • 6
    • 0003597031 scopus 로고
    • G. L. Harris (ed.), INSPEC, London
    • G. L. Harris (ed.), Properties of Silicon Carbide (INSPEC, London, 1995).
    • (1995) Properties of Silicon Carbide


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.