Transparent conducting thin films by co-sputtering of ZnO-ITO targets

Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 7, Issue 3-4, 2010, Pages 953-956

  Carreras, Paz ^a   Antony, Aldrin ^a   Roldán, Rubén ^a   Nos, Oriol ^a   Frigeri, Paolo Antonio ^a   Asensi, José Miguel ^a   Bertomeu, Joan ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS THIN FILMS; AS-DEPOSITED FILMS; COSPUTTERING; ELECTRICAL AND OPTICAL PROPERTIES; ELECTRICAL PROPERTY; ELECTRICAL RESISTIVITY; ITO FILMS; MULTI-COMPONENT OXIDES; OPTICAL TRANSMISSIONS; RF-MAGNETRON CO-SPUTTERING; RF-POWER; ROOM TEMPERATURE; VISIBLE-WAVELENGTH RANGE; ZN CONTENT; ZNO;

AMORPHOUS FILMS; COBALT; DEPOSITION; ELECTRIC CONDUCTIVITY; ITO GLASS; LIGHT TRANSMISSION; MAGNETRONS; OPTICAL PROPERTIES; OXIDE FILMS; TARGETS; THIN FILMS; TIN; ZINC; ZINC OXIDE;

CONDUCTIVE FILMS;

EID: 77952564387     PISSN: 18626351     EISSN: 16101642     Source Type: Journal    
DOI: 10.1002/pssc.200982852     Document Type: Conference Paper

References (18)

1. F. Villar, A. Antony, J. Escarré, D. Ibarz, R. Roldán, M. Stella, D. Muñoz, J. M. Asensi, and J. Bertomeu, Thin Solid Films 517, 3575 (2009).
2. K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano, and H. Hosono, Nature 432, 488 (2004).
3. J. R Bellingham, W. A. Phillips, and C. J. Adkins, J. Phys.: Condens. Matter 2 6207 (1990).
4. T. Minami and T. Miyata, Thin Solid Films 517, 1474 (2008).
5. J. M. Park, J. J. Kim, H. M. Kim, J. H. Kim, S. W. Ryu, and S. H. Park, J. Korean Phys. Soc. 48, 1624 (2006).
6. J. Müller, B. Rech, J. Springer, and M. Vanecek, Sol. Energy 77, 917 (2004).
7. K. J. Saji, M. K. Jayaraj, K. Nomura, T. Kamiya, and H. Hosono, J. Electrochem. Soc. 155, H390 (2008).
8. H. Hosono, N. Kikuchi, N. Ueda, and H. Kawazoe J. Non-Cryst. Solids 198-200, 165 (1996).
9. S. Narushima, M. Orita, M. Hirano, and H. Hosono, Phys. Rev. B 66 035203 (2002).
10. M. Nisha, S. Anusha, A. Antony, R. Manoj, and M.K. Jayaraj, Appl. Surf. Sci. 252, 1430 (2005).
11. C. Klingshirn, Phys. Status Solidi B 244(9), 3027 (2007).
12. D. S. Liu, C. C. Wu, and C. T. Lee, Jpn. J. Appl. Phys. 44(7A), 5119 (2005).
13. R. Bel Hadj Tahar, T. Ban, Y. Ohya, and Y. Takahashi. J. Appl. Phys. 83 2631 (1998).
14. T. Minami, T. Yamamoto, Y. Toda, and T. Miyata. Thin Solid Films 373, 189 (2000).
15. A. Donato, F. Della Corte, M. Gioffre, N. Donato, A. Bonavita, G. Micali, and G. Neri, Thin Solid Films 517, 6184 (2009).
16. J. I. Pankove, Optical Processes in Semiconductors (Dover Publications, New York, 1971), p. 93.
17. E. Burstein, Phys. Rev. 93, 632 (1954).
18. T. S. Moss, Proc. Phys. Soc. B 76, 775 (1954).