RF sputtered ZnO-ITO films for high temperature CO sensors

Thin Solid Films

Volumn 517, Issue 22, 2009, Pages 6184-6187

  Donato, A ^a   Della Corte, F ^a   Gioffre M ^b   Donato, N ^c   Bonavita, A ^c   Micali, G ^c   Neri, G ^c  

^a UNIVERSITY MEDITERRANEA OF REGGIO CALABRIA   (Italy)

^b CNR   (Italy)

^c UNIVERSITY OF MESSINA   (Italy)

Author keywords

CO exhaust sensors; RF sputtering; ZnO ITO

Indexed keywords

CAR ENGINES; CERAMIC SENSORS; CO EXHAUST SENSORS; CO SENSORS; ENGINE DIAGNOSTICS; HARSH ENVIRONMENT; HIGH TEMPERATURE; ITO FILMS; ITO THIN FILMS; RESISTIVE SENSOR; RF-SPUTTERING; WORKING TEMPERATURES; ZNO; ZNO-ITO;

CARBON FILMS; CARBON MONOXIDE; SEMICONDUCTING ZINC COMPOUNDS; SENSORS; THIN FILMS;

ZINC OXIDE;

EID: 67650401382     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.04.006     Document Type: Article

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