A comparative analyze of fundamental noise in cantilever sensors based on lateral and longitudinal displacement: Case of thermal infrared detectors

Microsystem Technologies

Volumn 16, Issue 5, 2010, Pages 755-763

  Matović, Jovan ^a   Jakšić, Zoran ^b  

^a Institute of Sensors and Actuating Systems   (Austria)

^b UNIVERSITY OF BELGRADE   (Serbia)

Author keywords

[No Author keywords available]

Indexed keywords

BI-MATERIAL; BI-MATERIAL CANTILEVER; BIMATERIAL STRUCTURE; CANTILEVER BASED SENSORS; CANTILEVER DISPLACEMENT; CANTILEVER SENSORS; CANTILEVER TIP; COMPARATIVE ANALYSIS; FUNDAMENTAL DETECTION; FUNDAMENTAL LIMITS; FUNDAMENTAL NOISE; LONGITUDINAL DISPLACEMENTS; MECHANICAL SENSORS; MEMS TECHNOLOGY; NANOMECHANICAL SENSORS; OUTPUT SIGNAL; PERFORMANCE LIMITS; PRODUCTION TECHNOLOGY; THERMAL INFRARED DETECTORS; THERMO-MECHANICAL;

ATOMIC FORCE MICROSCOPY; CANTILEVER BEAMS; NANOCANTILEVERS; SIGNAL TO NOISE RATIO;

SENSORS;

EID: 77952430682     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-010-1052-6     Document Type: Conference Paper

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