Ultrasensitive mass sensor based on lateral extensional mode (LEM) piezoelectric resonator

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 78-81

  Pang, Wei ^a   Yan, Le ^b   Zhang, Hao ^a   Yu, Hongyu ^a   Kim, Eun Sok ^a   Tang, William C ^b  

^a University of Southern California ^*  (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ISOPROPANOL VAPORS; LATERAL EXTENSIONAL MODE (LEM); MINIMUM DETECTABLE MASS (MDM); ULTRASENSITIVE MASS SENSORS;

ABSORPTION; FREQUENCY SHIFT KEYING; NATURAL FREQUENCIES; PIEZOELECTRIC DEVICES; SENSORS; VAPORS;

RESONATORS;

EID: 33750104231     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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