Wiring nanoscale biosensors with piezoelectric nanomechanical resonators

Nano Letters

Volumn 10, Issue 5, 2010, Pages 1769-1773

  Sadek, Akram S ^a   Karabalin, Rassul B ^a   Du, Jiangang ^a   Roukes, Michael L ^a   Koch, Christof ^a   Masmanidis, Sotiris C ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Multiplexing; NEMS; Neural probe

Indexed keywords

ACTION POTENTIALS; ELECTRICAL POTENTIAL; ELECTROCHEMICAL SENSING; EXTRACELLULAR; IMPLANTABLE SENSORS; IN-VIVO; MEDICAL DIAGNOSTICS; MINIMALLY INVASIVE; MULTI-SITE; NANO ELECTROMECHANICAL SYSTEMS; NANO SCALE; NANOMECHANICAL RESONATORS; NANOSCALE BIOSENSORS; NANOSCALE DEVICE; NEURAL PROBE; NEURAL PROBES; REAL TIME MEASUREMENTS; SENSITIVE DEVICES; SINGLE OUTPUT;

BIOSENSORS; MULTIPLEXING; PROBES; RESONATORS; TIME MEASUREMENT;

NANOSTRUCTURED MATERIALS;

ARTICLE; COMPUTER AIDED DESIGN; CONDUCTOMETRY; EQUIPMENT; EQUIPMENT DESIGN; GENETIC PROCEDURES; INSTRUMENTATION; MICROELECTROMECHANICAL SYSTEM; NANOTECHNOLOGY; TRANSDUCER; VIBRATION;

BIOSENSING TECHNIQUES; COMPUTER-AIDED DESIGN; CONDUCTOMETRY; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MICRO-ELECTRICAL-MECHANICAL SYSTEMS; NANOTECHNOLOGY; TRANSDUCERS; VIBRATION;

EID: 77952393112     PISSN: 15306984     EISSN: 15306992     Source Type: Journal    
DOI: 10.1021/nl100245z     Document Type: Article

References (31)

1. Joachim, C.; Gimzewski, J. K. Chem. Phys. Lett. 1997, 265, 353-357
2. Bachtold, A.; Hadley, P.; Nakanishi, T.; Dekker, C. Science 2001, 294, 1317-1320
3. Kong, J.; Franklin, N. R.; Zhou, C. W.; Chapline, M. G.; Peng, S.; Cho, K. J.; Dai, H. J. Science 2000, 287, 622-625
4. Cui, Y.; Wei, Q.; Park, H.; Lieber, C. M. Science 2001, 293, 1289-1292
5. Ekinci, K. L.; Huang, X. M. H.; Roukes, M. L. Appl. Phys. Lett. 2004, 84, 4469-4471
6. Zhong, Z.; Wang, D.; Cui, Y.; Bockrath, M. W.; Lieber, C. M. Science 2003, 302, 1377-1379
7. Beckman, R.; Johnston-Halperin, E.; Luo, Y.; Green, J. E.; Heath, J. R. Science 2005, 310, 465-468
8. Wang, Z. L.; Song, J. Science 2006, 312, 242-246
9. Walt, D. R. Nat. Mater. 2002, 1, 17-18
10. Zheng, G.; Patolsky, F.; Cui, Y.; Wang, W. U.; Lieber, C. M. Nat. Biotechnol. 2005, 23, 1294-1301
11. Patolsky, F.; Timko, B. P.; Yu, G. H.; Fang, Y.; Greytak, A. B.; Zheng, G. F.; Lieber, C. M. Science 2006, 313, 1100-1104
12. Feynman, R. P. Feynman Lectures on Computation; Addison-Wesley: Reading, MA, 1996.
13. Masmanidis, S. C.; Karabalin, R. B.; De Vlaminck, I.; Borghs, G.; Freeman, M. R.; Roukes, M. L. Science 2007, 317, 780-783
14. Timoshenko, S. Vibration Problems in Engineering, 4 th ed.; Wiley: New York, 1974.
15. Cleland, A. N.; Roukes, M. L. Nature 1998, 392, 160-162
16. Truitt, P. A.; Hertzberger, J. B.; Huang, C. C.; Ekinci, K. L.; Schwab, K. C. Nano Lett. 2007, 7, 120-126
17. Unterreithmeier, Q. P.; Weig, E. M.; Kotthaus, J. P. Nature 2009, 458, 1001-1004
18. Huang, X. M. H.; Feng, X. L.; Zorman, C. A.; Mehregany, M.; Roukes, M. L. New J. Phys. 2005, 7, 247
19. Carr, D. W.; Craighead, H. G. J. Vac. Sci. Technol., B 1997, 15, 2760-2763
20. Ekinci, K. L.; Yang, Y. T.; Roukes, M. L. J. Appl. Phys. 2004, 95, 2682-2689
21. Buks, E.; Yurke, B. Phys. Rev. E 2006, 74 046619
22. Buzsáki, G. Nat. Neurosci. 2004, 7, 446-451
23. Najafi, K.; Ji, J.; Wise, K. D. IEEE Trans. Biomed. Eng. 1990, 37, 1-11
24. Du, J.; Riedel-Kruse, I. H.; Nawroth, J. C.; Roukes, M. L.; Laurent, G.; Masmanidis, S. C. J. Neurophysiol. 2009, 101, 1671-1678
25. Ryckebusch, S.; Laurent, G. J. Neurophysiol. 1994, 72, 2771-2785
26. Rutishauser, U.; Schuman, E. M.; Mamelak, A. N. J. Neurosci. Methods 2006, 154, 204-224
27. Tilmans, H. A. C.; Elwenspoek, M.; Fluitman, J. H. J. Sens. Actuators, A 1992, 30, 35-53
28. Harrison, R. R.; Charles, C. A.; IEEE, J. Solid-State Circuits 2003, 38, 958-965
29. Li, M.; Pernice, W. H. P.; Xiong, C.; Baehr-Jones, T.; Hochberg, M.; Tang, H. X. Nature 2008, 456, 480-484
30. De Vlaminck, I.; Roels, J.; Taillaert, D.; Van Thourhout, D.; Baets, R.; Lagae, L.; Borghs, G. Appl. Phys. Lett. 2007, 90, 233116
31. Mandal, S.; Zhak, S. M.; Sarpeshkar, R. IEEE J. Solid-State Circuits 2009, 44, 1814-1828