Electrical interfacing between neurons and electronics via vertically integrated sub-4mu;m-diameter silicon probe arrays fabricated by vapor-liquid-solid growth

Biosensors and Bioelectronics

Volumn 25, Issue 7, 2010, Pages 1809-1815

  Kawano, Takeshi ^a   Harimoto, Tetsuhiro ^a,b   Ishihara, Akito ^b   Takei, Kuniharu ^a   Kawashima, Takahiro ^a   Usui, Shiro ^c   Ishida, Makoto ^a  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

^b CHUKYO UNIVERSITY   (Japan)

^c RIKEN BRAIN SCIENCE INSTITUTE   (Japan)

Author keywords

Integrated circuit (IC); Microelectrode array; MOSFET; Neural interface; Retina; Vapor liquid solid growth

Indexed keywords

INTEGRATED CIRCUITS; LIQUIDS; MICROELECTRODES; MICROELECTRONICS; NEURONS; PROBES; SEMICONDUCTING SILICON; SILICON;

MICROELECTRODE ARRAY; MOS-FET; NEURAL INTERFACES; RETINA; VAPOR-LIQUID-SOLID GROWTH;

PHASE INTERFACES;

ANIMAL TISSUE; ARTICLE; CARP; ELECTRIC POTENTIAL; ELECTRIC RESISTANCE; ELECTRORETINOGRAM; EVOKED VISUAL RESPONSE; IMPEDANCE; MECHANICAL PROBE; MICROELECTRODE; MICROTECHNOLOGY; NERVE CELL; NERVOUS SYSTEM ELECTROPHYSIOLOGY; NONHUMAN; RETINA; SILICON PROBE ARRAY; VAPOR LIQUID SOLID GROWTH; ACTION POTENTIAL; ANIMAL; CELL CULTURE; CHEMISTRY; CRYSTALLIZATION; CULTURE TECHNIQUE; CYTOLOGY; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; LIGHT; METHODOLOGY; PHASE TRANSITION; PHOTOTRANSDUCTION; PHYSIOLOGY; RADIATION EXPOSURE; RETINA GANGLION CELL; SYSTEM ANALYSIS;

CYPRINIDAE; CYPRINUS CARPIO;

SILICON;

ACTION POTENTIALS; ANIMALS; CARPS; CELL CULTURE TECHNIQUES; CELLS, CULTURED; CRYSTALLIZATION; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; LIGHT; LIGHT SIGNAL TRANSDUCTION; MICROELECTRODES; NEURONS; PHASE TRANSITION; RETINAL GANGLION CELLS; SILICON; SYSTEMS INTEGRATION;

EID: 77952297619     PISSN: 09565663     EISSN: 18734235     Source Type: Journal    
DOI: 10.1016/j.bios.2009.12.037     Document Type: Article

References (42)

1. Asai, S., Kato, K., Nakazaki, N., Nakajima, Y., 1996. IEEE Transactions on Components,Packaging, and ManufacturingTechnology, Part A 19, 258-267.
2. Asano, T., 1977. The Japanese Journal of Physiology 27, 701-716.
3. Barthó, P., Hirase, H., Monconduit, L., Zugaro, M., Harris, K.D., Buzsáki, G., 2004.Journal of Neurophysiology 92, 600-608.
4. Bai, Q., Wise, K.D., 2001. IEEE Transaction on Biomedical Engineering 48, 911-920.
5. Buzsáki, G., 2004. Nature Neuroscience 7, 446-451.
6. Chapin, J.K., Moxon, K.A., Markowitz, R.S., Nicolelis, M.A.L., 1999. Nature Neuroscience 2, 664-670.
7. Csicsvari, J., Henze, D.A., Jamieson, B., Harris, K.D., Sirota, A., Barthó, P., Wise, K.D., Buzsáki, G., 2003. Journal of Neurophysiology 90, 1314-1323.
8. Hochberg, L.R., Serruya, M.D., Friehs, G.M., Mukand, J.A., Saleh, M., Caplan, A.H., Branner, A., Chen, D., Penn, R.D., Donoghue, J.P., 2006. Nature 442, 164-171.
9. Hoffmann, S., Utke, I., Moser, B., Michler, J., Christiansen, S.H., Schmidt, V., Senz, S., Werner, P., Gösele, U., Ballif, C., 2006. Nano Letters 6, 622-625.
10. Harrison, R.R., Charles, C., 2003. IEEE Journal of Solid-State Circuits 38, 958-965.
11. Ikedo, A., Kawashima, T., Kawano, T., Ishida, M., 2009. Applied Physics Letters 95, 033502.
12. Ishida, M., Sogawa, K., Ishikawa, A., Fujii, M., 1999. Proceeding of 10th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers'99), pp. 866-869.
13. Islam, M.S., Ishino, H., Kawano, T., Takao, H., Sawada, K., Ishida, M., 2005. Japanese Journal of Applied Physics 44, 2161 2165.
14. Jones, K.E., Compbell, P.K., Normann, R.A., 1992. Annals of Biomedical Engineering 20, 423-437.
15. Kaneko, A., Yamada, M., 1972. Journal of Physiology 227, 261-273.
16. Kato, Y., Takao, H., Sawada, K., Ishida, M., 2004. Japanese Journal of Applied Physics 43, 6848-6853.
17. Kawano, T., Kato, Y., Futagawa, M., Tani, R., Takao, H., Sawada, K., Ishida, M., 2002. Sensors and Actuators: A, Physical 97-98, 709-715.
18. Kawano, T., Takao, H., Sawada, K., Ishida, M., 2003. Japanese Journal of Applied Physics 42, 2473-2477.
19. Kawano, T., Kato, Y., Tani, R., Takao, H., Sawada, K., Ishida, M., 2004. IEEE Transactions on Electron Devices ED-51, 415 420.
20. Keefer, E.W., Botterman, B.R., Romero, M.I., Rossi, A.F., Gross, G.W., 2008. Nature Nanotechnology 3, 434-439.
21. Kipke, D.R., Vetter, R.J., Williams, J.C., Hetke, J.F., 2003. IEEE Transaction on Neural Systems and Rehabilitation Engineering 11, 151-155.
22. Kringelbach, M.L., Jenkinson, N., Owen, S.L.F., Aziz, T.Z., 2007. Nature Reviews Neuroscience 8, 623-635.
23. Lin, C.M., Lee, Y.T., Yeh, S.R., Fang, W., 2009. Biosensors and Bioelectronics 24, 2791-2797.
24. Momose, H.S., Ohguro, T., Nakamura, S., Toyoshima, Y., Ishiuchi, H., Iwai, H., 2003. IEEE Transaction on Electron Devices 49, 1597-1605.
25. Oka, H., Shimono, K., Ogawa, R., Sugihara, H., Taketani, M., 1999. Journal of Neuroscience Methods 93, 61-67.
26. Regehr, W.G., Pine, J., Cohan, C.S., Mischke, M.D., Tank, D.W., 1989. Journal of Neuroscience Methods 30, 91-106.
27. Robinson, D.A., 1968. Proceeding of the IEEE 56, 1065-1071.
28. Roessel, P., Palacios, A.G., Goldsmith, T.H., 1997. Journal of Comparative Physiology A 181, 493-500.
29. Rousche, P.J., Pellinen, D.S., Pivin D.P.Jr., Williams, J.C., Vetter, R.J., Kipke, D.R., 2001. EEE Transaction on Biomedical Engineering 44, 361-371.
30. Stieglitz, T., 2004. In: Horch, K.W., Dhillon, G.S. (Eds.), Neuroprosthetics-Theory and Practice. World Scientific.
31. Szarowski, D.H., Andersen, M.D., Retterer, S., Spence, A.J., Isaacson, M., Craighead, H.G., Turner, J.N., Shain, W., 2003. Brain Research 983, 23-35.
32. Sze, S.M., 2001. Semiconductor Devices: Physics and Technology, 2nd ed. Wiley,New York.
33. Takei, K., Kawashima, T., Kawano, T., Takao, H., Sawada, K., Ishida, M., 2008. Journal of Micromechanics and Microengineering 18, 035033.
34. Takeuchi, S., Ziegler, D., Yoshida, Y., Mabuchi, K., Suzuki, T., 2005. Lab-on-a-Chip 5, 519-523.
35. Vann Epps, H.A., Yim, C.M., Hurley, J.B., Brockerhoff, S.E., 2001. Investigative Ophthalmology & Visual Science 42 (3), 868-874.
36. Vetter, R.J., Williams, J.C., Hetke, J.F., Nunamaker, E.A., Kipke, D.R., 2004. IEEE Transaction on Biomedical Engineering 51, 896-904.
37. Wagner, R.S., Ellis, W.C., 1964. Applied Physics Letters 4, 89-90.
38. Wessberg, J., Stambaugh, C.R., Kralik, J.D., Beck, P.D., Laubach, M., Chapin, J.K., Kim, J., Biggs, S.J., Srinivasan, M.A., Nicolelis, M.A.L., 2000. Nature 408, 361-365.
39. Wise, K.D., Najafi, K., 1991. Science 254, 1335-1342.
40. Wise, K.D., Anderson, D.J., Hetke, J.F., Kipke, D.R., Najafi, K., 2004. Proceeding of the IEEE 92, 76-97.
41. Witkovsky, P., Nelson, J., Ripps, H., 1973. The Journal of General Physiology 61, 401-423.
42. Xu, C., Lemon, W., Liu, C., 2002. Sensors and Actuators: A, Physical 96, 78-85.