Multichannel 5 × 5-site 3-dimensional Si microprobe electrode array for neural activity recording system

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 4 B, 2003, Pages 2473-2477

  Kawano, Takeshi ^a   Takao, Hidekuni ^a   Sawada, Kazuaki ^a   Ishida, Makoto ^a  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

Microelectrode; Multielectrode array; Neural interface; Neural probe; Vapor liquid solid growth

Indexed keywords

ARRAYS; ELECTRON DEVICE MANUFACTURE; GOLD; MOLECULAR BEAM EPITAXY; PRESSURE EFFECTS; SEMICONDUCTING SILICON; SILICON COMPOUNDS; STRENGTH OF MATERIALS;

MICROPROBE ELECTRODE ARRAY; NEURAL ACTIVITY RECORDING SYSTEM; VAPOR-LIQUID-SOLID GROWTH;

MICROELECTRODES;

EID: 0038346813     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.2473     Document Type: Article

References (5)

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