Integration of out-of-plane silicon dioxide microtubes, silicon microprobes and on-chip NMOSFETs by selective vapor-liquid-solid growth

Journal of Micromechanics and Microengineering

Volumn 18, Issue 3, 2008, Pages

  Takei, Kuniharu ^a,c   Kawashima, Takahiro ^a   Kawano, Takeshi ^a,b   Takao, Hidekuni ^a,b   Sawada, Kazuaki ^a,b   Ishida, Makoto ^a,b  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c JAPAN SOCIETY FOR THE PROMOTION OF SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFACES (MATERIALS); MICROELECTRONICS; MOSFET DEVICES; THRESHOLD VOLTAGE;

SALINE ENVIRONMENT; SILICON MICROPROBES;

SILICA;

EID: 42549161439     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/3/035033     Document Type: Article

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