Athermal and low loss ridge silicon waveguides

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7606, Issue , 2010, Pages

  Milošević, Milan M ^a   Mashanovich, Goran Z ^a   Gardes, Frederic Y ^a   Hu, Youfang ^a   Knights, Andrew P ^b   Tarr, N Garry ^c   Reed, Graham T ^a  

^a UNIVERSITY OF SURREY   (United Kingdom)

^b MCMASTER UNIVERSITY   (Canada)

^c CARLETON UNIVERSITY   (Canada)

Author keywords

Athermal waveguides; Low loss waveguides; Mode coupling; Near infrared; Silicon on insulator

Indexed keywords

A-THERMAL; ATHERMAL WAVEGUIDES; LOW-LOSS WAVEGUIDES; MODE COUPLING; NEAR INFRARED; SILICON ON INSULATOR;

DATA FLOW ANALYSIS; INFRARED DEVICES; OPTICAL WAVEGUIDES; PHOTONIC DEVICES; WAVEGUIDES;

ELECTRIC LOSSES;

EID: 77951690253     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.840856     Document Type: Conference Paper

References (29)

1. Huang, M., Yan, X., "Thermal stress effects on the temperature sensitivity of optical waveguides," J. Opt. Soc. Am. B 20(6), 1326-1333 (2003).
2. Lee, J. M., Kim, D. J., Kwon, O. K., Kim, K. J., Kim, G., "Controlling temperature dependence of silicon waveguide using slot structure," Opt. Express 16(3), 1645-1652 (2008). (Pubitemid 351246295)
3. Watanabe, T., Ooba, N., Hayashida, S., Kurihara, T., Imamura, S., "Polymeric optical waveguide circuits formed using silicone resin," J. Lightw. Technol. 16(6), 1049-1055 (1998). (Pubitemid 128590250)
4. Uenuma, M., Moooka, T., "Temperature-independent silicon waveguide optical filter," Opt. Lett. 34(5), 599-601 (2009).
5. Kokubun, Y., Takizawa, M., Taga, S., "Three-dimensional athermal waveguides for temperature independent lightwave devices," Elec. Lett. 30(15), 1223-1224 (1994).
6. Teng, J., Dumon, P., Bogaerts, W., Zhang, H., Jian, X., Han, X., Zhao, M., Morthier, G., Baets, R., "Athermal silicon-on-insulator ring resonators by overlaying a polymer cladding on narrowed waveguides," Opt. Express 17(17), 14627-14633 (2009).
7. Zhou, L., Okamoto, K., and Yoo, S. J. B., "Athermalizing and trimming of slotted silicon microring resonators with UV-sensitive PMMA upper-cladding," IEEE Photon. Technol. Lett. 21(17), 1175-1177 (2009).
8. Han, M. and Wang, A., "Temperature compensation of optical microresonators using a surface layer with negative thermo-optic coefficient," Opt. Lett. 32(13), 1800-1802 (2007).
9. Rowe, L. K., Elsey, M., Tarr, N. G., Knights, A. P., and Post, E., "CMOS compatible optical rib waveguides defined by local oxidation of silicon," Electron. Lett. 43, 392-393 (2007). (Pubitemid 46516286)
10. Yi, C. K., Moll, J. L., and Manoliu, J., "A bird's beak free local oxidation technology feasible for VLSI circuits fabrication," IEEE Trans. Electron. Devices 29, 536-540 (1982). (Pubitemid 12549343)
11. Gardes, F. Y., Reed, G. T., Knights, A. P., Mashanovich, G., Jessop, P. E., Rowe, L., McFaul, S., Bruce, D., Tarr, N. G., "Submicron optical waveguides for silicon photonics formed via Local Oxidation of Silicon (LOCOS)," Proc. SPIE 6898, 23-29 (2008).
12. Cardenas, J., Poitras, C. B., Robinson, J. T., Preston, K., Chen, L., and Lipson, M., "Low loss etchless silicon photonic waveguides," Opt. Express 17(6), 4752-4757 (2009).
13. Webster, M. A., Pafchek, R. M., Sukumaran, G., and Koch, T. L., "Low-loss quasi planar ridge waveguides formed on thin silicon-on- insulator," Appl. Phys. Lett. 87, 231108 (2005).
14. Webster, M. A., Pafchek, R. M., Mitchell, A. and Koch, T. L., "Width dependence of inherent TM-mode lateral leakage loss in silicon-on-insulator ridge waveguides," IEEE Photon. Technol. Lett. 19(6), 429-431 (2007).
15. Nguyen, T. G., Tummidi, R. S., Koch, T. L., and Mitchell, A., "Rigorous modeling of lateral leakage loss in SOI thin-ridge waveguides and couplers," IEEE Photon. Technol. Lett. 21(7), 486-488 (2009).
16. Koshiba, M., Kakihara, K. and Saitoh, K., "Reduced lateral leakage losses of TM-like modes in silicon-on-insulator ridge waveguides," Opt. Lett. 33(17), 2008-2010 (2008).
17. Oliner, A. A., Peng, S. T., Hsu, T. I., Sanchez, A., "Guidance and leakage properties of a class of open dielectric waveguides: Part II - New physical effects," IEEE Trans. Microw. theory and techn. MTT-29(9), 855-869 (1981). (Pubitemid 12439413)
18. 2-Si 8-nm slot waveguides," IEEE Photon. Technol. Lett. 21(6), 353-355 (2009).
19. Muellner, P., Finger, N., and Hainberger, R., "Lateral leakage in symmetric SOI rib-type slot waveguides," Opt. Express, 16(1), 287-294 (2008).
20. Kokubun, Y., Funato, N., Takizawa, M., "Athermal waveguides for temperature-independent lightwave devices," IEEE Photon. Technol. Lett. 5(11), 1297-1300 (1993).
21. Lee, J. M., Kim, D. J., Ahn, H., Park, S. H., Kim, G., "Temperature dependence of silicon nanophotonic ring resonator with a polymeric overlayer," J. Lightw. Technol. 25(8), 2236-2243 (2007). (Pubitemid 47307986)
22. Zhang, H., Wang, J., Li, L., Song, Y., Zhao, M., Jian, X., "Synthesis of liquid polysilisiquioxane resins and properties of cured films," Thin solid films 517, 857-862 (2008).
23. Ye, W. N., Michel, J., Kimerling, L. C., "Athermal high-index-contrast waveguide design," IEEE Photon. Technol. Lett. 20(11), 885-887 (2008).
24. Maru, K., Abe, Y., Ito, M., Ishikawa, H., Himi, S., Uetsuka, H., Mizumoto, T., "2.5%-Δ Silica-based athermal arrayed waveguide grating employing spot-size converters based on segmented core," IEEE Photon. Technol. Lett. 17(11), 2325-2327 (2005). (Pubitemid 41594807)
25. Kamei, S., Iemura, K., Kaneko, A., Inoue, Y., Shibata, T., Takahashi, H., Sugita, A., "1.5%-Δ Athermal arrayed-waveguide grating multi/demultiplexer with very low loss groove design," IEEE Photon. Technol. Lett. 17(3), 588-590 (2005). (Pubitemid 40351662)
26. Watanabe, T., Ooba, N., Hida, Y., Hikita, M., "Influence of humidity on refractive index of polymers for optical waveguide and its temperature dependence," Appl. Phys. Lett. 72(13), 1533-1535 (1998). (Pubitemid 128671379)
27. Photon Design, www.photondesign.com
28. Ye, W. N., Sun, R., Michel, J., Eldada, L., Pant, D., Kimerling, L. C., "Thermo-optical compensation in high-index-contrast waveguides," Proc. of IEEE Group IV Photonics conference FC6, 401-403 (2008).
29. Comsol, www.comsol.com