Requirements of MEMS membrane mirrors for focus adjustment and aberration correction in endoscopic confocal and optical coherence tomography imaging instruments

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 7, Issue 2, 2008, Pages

  Dickensheets, David L ^a  

^a Montana State University   (United States)

Author keywords

Aberration compensation; Adaptive optics; Confocal microscopy; Deformable membrane; Micro electro mechanical systems; Micro opto electro mechanical systems; Optical coherence tomography; Variable focus

Indexed keywords

COMPOSITE MICROMECHANICS; CONFOCAL MICROSCOPY; DEFORMATION; INSTRUMENTS; MECHANICAL ENGINEERING; MICROELECTROMECHANICAL DEVICES; MIRRORS; SILICON NITRIDE; TISSUE; TOMOGRAPHY;

ABERRATION COMPENSATION; DEFORMABLE MEMBRANES; MICRO ELECTRO MECHANICAL SYSTEM; MICRO OPTO ELECTRO MECHANICAL SYSTEMS; VARIABLE FOCUS;

MEMBRANES;

EID: 77951611770     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.2911024     Document Type: Conference Paper

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