Micromachined silicon nitride deformable mirrors for focus control

Optics Letters

Volumn 26, Issue 16, 2001, Pages 1280-1282

  Himmer, Phillip A ^a   Dickensheets, David L ^a   Friholm, Robert A ^a  

^a Montana State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

OPTOELECTROMECHANICAL DEVICES;

ABERRATIONS; BOUNDARY CONDITIONS; DEFORMATION; ELECTROMECHANICAL DEVICES; FOCUSING; LIGHT INTERFERENCE; MICROMACHINING; OPTOELECTRONIC DEVICES; SILICON NITRIDE; VOLTAGE CONTROL;

MIRRORS;

EID: 0007410675     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.26.001280     Document Type: Article

References (10)

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7. D. L. Dickensheets, P. A. Himmer, R. Friholm, and B. J. Lutzenberger, Proc. SPIE 4178, 90 (2000).
8. D. L. Dickensheets, P. V. Ashcraft, and P. A. Himmer, Proc. SPIE 3878, 48 (1999).
9. D. L. Dickensheets and G. S. Kino, IEEE J. Microelectromech. Syst. 7, 38 (1998).
10. M. Sheplak and J. Dugundji, J. Appl. Mech. 65, 107 (1998).